JPS63137819U - - Google Patents
Info
- Publication number
- JPS63137819U JPS63137819U JP2888987U JP2888987U JPS63137819U JP S63137819 U JPS63137819 U JP S63137819U JP 2888987 U JP2888987 U JP 2888987U JP 2888987 U JP2888987 U JP 2888987U JP S63137819 U JPS63137819 U JP S63137819U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- peripheral part
- thin
- adhered
- mechanical quantity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 claims 3
- 230000001070 adhesive effect Effects 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 3
- 239000002245 particle Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
第１図は本考案の全体の構成を示す一実施例の
断面図、第２図は圧電ダイアフラム及び支持部材
の一実施例の正面図及びＡ−Ａ′断面図、第３図
は本考案の他の実施例図、第４図はバイモルフ構
造の圧電ダイアフラムの温度特性図、第５図は従
来装置の一例の断面図及び圧電素子の平面図であ
る。
符号の説明、１……圧電ダイアフラム、４……
支持部材、１０……金属薄板、１１，１２，２０
，２１……圧電素子。
Fig. 1 is a sectional view of an embodiment showing the overall structure of the present invention, Fig. 2 is a front view and A-A' sectional view of an embodiment of the piezoelectric diaphragm and supporting member, and Fig. 3 is a sectional view of an embodiment of the invention. FIG. 4 is a temperature characteristic diagram of a piezoelectric diaphragm having a bimorph structure, and FIG. 5 is a cross-sectional view of an example of a conventional device and a plan view of a piezoelectric element. Explanation of symbols, 1...Piezoelectric diaphragm, 4...
Supporting member, 10... Metal thin plate, 11, 12, 20
, 21...piezoelectric element.
Claims (1)
板状の圧電素子を接着した圧電ダイアフラムの周
辺部を支持部材を介して筺体に固定した圧電型力
学量センサにおいて、上記金属薄板との接着面の
表面粗さを接着に用いる無機質接着剤の粒子の粒
径と同程度になるように表面処理した圧電素子を
、上記金属薄板に上記無機質接着剤を用いて接着
したことを特徴とする圧電型力学量センサ。 In a piezoelectric mechanical quantity sensor in which the peripheral part of a piezoelectric diaphragm is fixed to a casing via a support member, the peripheral part of a piezoelectric diaphragm in which a thin piezoelectric element is adhered to a part of a thin metal plate excluding at least the peripheral part, the surface of the adhesive surface with the metal thin plate. A piezoelectric mechanical quantity characterized in that a piezoelectric element whose surface has been treated to have a roughness comparable to the particle size of the particles of an inorganic adhesive used for adhesion is adhered to the thin metal plate using the inorganic adhesive. sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2888987U JPS63137819U (en) | 1987-03-02 | 1987-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2888987U JPS63137819U (en) | 1987-03-02 | 1987-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137819U true JPS63137819U (en) | 1988-09-12 |
Family
ID=30832270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2888987U Pending JPS63137819U (en) | 1987-03-02 | 1987-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137819U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017026829A1 (en) * | 2015-08-13 | 2017-02-16 | 명지대학교 산학협력단 | Vibration detection apparatus |
-
1987
- 1987-03-02 JP JP2888987U patent/JPS63137819U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017026829A1 (en) * | 2015-08-13 | 2017-02-16 | 명지대학교 산학협력단 | Vibration detection apparatus |