JPS63124665U - - Google Patents
Info
- Publication number
- JPS63124665U JPS63124665U JP1657787U JP1657787U JPS63124665U JP S63124665 U JPS63124665 U JP S63124665U JP 1657787 U JP1657787 U JP 1657787U JP 1657787 U JP1657787 U JP 1657787U JP S63124665 U JPS63124665 U JP S63124665U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- thin
- peripheral portion
- supporting member
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 3
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
Description
第１図は本考案の全体の構成を示す一実施例の
断面図、第２図は圧電ダイアフラム及び支持部材
の一実施例の正面図及びＡ―Ａ′断面図、第３〜
５図はそれぞれ本考案の一実施例の部分拡大図、
第６図は従来装置の一例の断面図及び圧電素子の
平面図である。
＜符号の説明＞、１……圧電ダイアフラム、２
，３……筐体、４，４ａ，４ｂ……支持部材、１
０……金属薄板、１１，１２……圧電素子、２０
ａ，２０ｂ……金属円板。
FIG. 1 is a cross-sectional view of an embodiment showing the overall structure of the present invention, FIG. 2 is a front view and A-A' cross-sectional view of an embodiment of the piezoelectric diaphragm and supporting member, and FIG.
Figure 5 is a partially enlarged view of an embodiment of the present invention, respectively.
FIG. 6 is a sectional view of an example of a conventional device and a plan view of a piezoelectric element. <Explanation of symbols>, 1...Piezoelectric diaphragm, 2
, 3... Housing, 4, 4a, 4b... Supporting member, 1
0... Metal thin plate, 11, 12... Piezoelectric element, 20
a, 20b...Metal disk.
Claims (1)
板状の圧電素子を設けた圧電ダイアフラムの周辺
部を支持部材を介して固定した圧電型力学量セン
サにおいて、上記支持部材のうちの少なくとも上
記金属薄板に接する部分を、上記金属薄板と上記
圧電素子とのいずれかの線膨張係数とほぼ同じ線
膨張係数を有する金属で形成したことを特徴とす
る圧電型力学量センサ。 In a piezoelectric mechanical quantity sensor in which a peripheral portion of a piezoelectric diaphragm is fixed via a supporting member, the peripheral portion of a piezoelectric diaphragm is provided with a thin piezoelectric element in a portion of a thin metal plate excluding at least the peripheral portion, and at least the thin metal plate of the supporting member is provided with a piezoelectric diaphragm. A piezoelectric mechanical quantity sensor characterized in that a contacting portion is formed of a metal having a linear expansion coefficient substantially the same as that of either the metal thin plate or the piezoelectric element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1657787U JPS63124665U (en) | 1987-02-09 | 1987-02-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1657787U JPS63124665U (en) | 1987-02-09 | 1987-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124665U true JPS63124665U (en) | 1988-08-15 |
Family
ID=30808562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1657787U Pending JPS63124665U (en) | 1987-02-09 | 1987-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124665U (en) |
-
1987
- 1987-02-09 JP JP1657787U patent/JPS63124665U/ja active Pending