JPS61187462U - - Google Patents
Info
- Publication number
- JPS61187462U JPS61187462U JP1985070133U JP7013385U JPS61187462U JP S61187462 U JPS61187462 U JP S61187462U JP 1985070133 U JP1985070133 U JP 1985070133U JP 7013385 U JP7013385 U JP 7013385U JP S61187462 U JPS61187462 U JP S61187462U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric diaphragm
- diaphragm
- support member
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Description
第１図は本考案の全体の構成を示す一実施例の
断面図、第２図は圧電ダイアフラム及び支持部材
の一実施例の正面図及びＡ―Ａ′断面図、第３図
は従来装置の一例の断面図及び圧電素子の平面図
である。
（符号の説明）、１……圧電ダイアフラム、４
……支持部材、１０……金属薄板、１１，１２…
…圧電素子。
Fig. 1 is a sectional view of one embodiment showing the overall structure of the present invention, Fig. 2 is a front view and A-A' sectional view of an embodiment of the piezoelectric diaphragm and supporting member, and Fig. 3 is a sectional view of a conventional device. FIG. 2 is a cross-sectional view of an example and a plan view of a piezoelectric element. (Explanation of symbols), 1...Piezoelectric diaphragm, 4
...Supporting member, 10...Thin metal plate, 11, 12...
…Piezoelectric element.
Claims (1)
板状の圧電素子を接着した圧電ダイアフラムを筐
体に装着し、上記圧電ダイアフラムに外部から力
学量が印加された場合に上記圧電素子に生ずる電
気信号を取り出すことによつて印加された力学量
を検出し、かつ、上記圧電ダイアフラム周辺部の
金属薄板の所定部分の表裏両面を所定の幅及び厚
さで覆う形状の弾性材からなる支持部材を、上記
圧電ダイアフラムと一体に成形し、この圧電ダイ
アフラムと支持部材とが一体化されたものを上記
筐体に装着したことを特徴とする圧電型力学量セ
ンサ。 A piezoelectric diaphragm in which a thin plate-like piezoelectric element is bonded to at least the peripheral part of a thin metal plate is attached to the housing, and an electric signal generated in the piezoelectric element is generated when a mechanical quantity is applied to the piezoelectric diaphragm from the outside. A support member made of an elastic material having a shape that detects the mechanical quantity applied by taking it out and covers both the front and back surfaces of a predetermined portion of the thin metal plate around the piezoelectric diaphragm with a predetermined width and thickness is provided as described above. A piezoelectric dynamic quantity sensor, characterized in that it is integrally molded with a piezoelectric diaphragm, and the piezoelectric diaphragm and support member are integrated and mounted on the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985070133U JPS61187462U (en) | 1985-05-14 | 1985-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985070133U JPS61187462U (en) | 1985-05-14 | 1985-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61187462U true JPS61187462U (en) | 1986-11-21 |
Family
ID=30606461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985070133U Pending JPS61187462U (en) | 1985-05-14 | 1985-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61187462U (en) |
-
1985
- 1985-05-14 JP JP1985070133U patent/JPS61187462U/ja active Pending