JPH0266276U - - Google Patents

Info

Publication number
JPH0266276U
JPH0266276U JP14516388U JP14516388U JPH0266276U JP H0266276 U JPH0266276 U JP H0266276U JP 14516388 U JP14516388 U JP 14516388U JP 14516388 U JP14516388 U JP 14516388U JP H0266276 U JPH0266276 U JP H0266276U
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
protective layer
polyimide resin
view
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14516388U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14516388U priority Critical patent/JPH0266276U/ja
Publication of JPH0266276U publication Critical patent/JPH0266276U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Air Humidification (AREA)
  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案に係る圧電振動子の一実施例を
示す斜視図、第2図は第1図における―断面
図、第3図は金属膜を設けた従来の圧電振動子の
縦断面図、第4図はガラス層を設けた従来の圧電
振動子の縦断面図、第5図はガラス層を設けた従
来の圧電振動子の表面粗さを示すグラフ、第6図
は本考案に係る圧電振動子の表面粗さを示すグラ
フである。 1…ポリイミド樹脂による保護層、21,22
…銀電極、3…圧電セラミツクス。
Fig. 1 is a perspective view showing an embodiment of a piezoelectric vibrator according to the present invention, Fig. 2 is a cross-sectional view of Fig. 1, and Fig. 3 is a vertical cross-sectional view of a conventional piezoelectric vibrator provided with a metal film. , FIG. 4 is a vertical cross-sectional view of a conventional piezoelectric vibrator provided with a glass layer, FIG. 5 is a graph showing the surface roughness of a conventional piezoelectric vibrator provided with a glass layer, and FIG. 6 is a graph showing the surface roughness of a conventional piezoelectric vibrator provided with a glass layer. It is a graph showing the surface roughness of a piezoelectric vibrator. 1...Protective layer made of polyimide resin, 21, 22
...silver electrode, 3...piezoelectric ceramics.

Claims (1)

【実用新案登録請求の範囲】 超音波放射面の電極に保護層を設けてなる圧電
振動子において、 前記保護層としてポリイミド系樹脂を用いてあ
ることを特徴とする圧電振動子。
[Claims for Utility Model Registration] A piezoelectric vibrator comprising a protective layer provided on an electrode on an ultrasonic emission surface, characterized in that a polyimide resin is used as the protective layer.
JP14516388U 1988-11-07 1988-11-07 Pending JPH0266276U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14516388U JPH0266276U (en) 1988-11-07 1988-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14516388U JPH0266276U (en) 1988-11-07 1988-11-07

Publications (1)

Publication Number Publication Date
JPH0266276U true JPH0266276U (en) 1990-05-18

Family

ID=31413515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14516388U Pending JPH0266276U (en) 1988-11-07 1988-11-07

Country Status (1)

Country Link
JP (1) JPH0266276U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04102680U (en) * 1991-02-14 1992-09-04 株式会社東海理化電機製作所 ultrasonic transducer
WO2004085835A1 (en) * 2003-03-27 2004-10-07 Ngk Insulators, Ltd. Liquid jet device and its manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04102680U (en) * 1991-02-14 1992-09-04 株式会社東海理化電機製作所 ultrasonic transducer
WO2004085835A1 (en) * 2003-03-27 2004-10-07 Ngk Insulators, Ltd. Liquid jet device and its manufacturing method

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