JPH0266276U - - Google Patents
Info
- Publication number
- JPH0266276U JPH0266276U JP14516388U JP14516388U JPH0266276U JP H0266276 U JPH0266276 U JP H0266276U JP 14516388 U JP14516388 U JP 14516388U JP 14516388 U JP14516388 U JP 14516388U JP H0266276 U JPH0266276 U JP H0266276U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- protective layer
- polyimide resin
- view
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011241 protective layer Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 2
- 239000009719 polyimide resin Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Air Humidification (AREA)
- Special Spraying Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
第1図は本考案に係る圧電振動子の一実施例を
示す斜視図、第2図は第1図における―断面
図、第3図は金属膜を設けた従来の圧電振動子の
縦断面図、第4図はガラス層を設けた従来の圧電
振動子の縦断面図、第5図はガラス層を設けた従
来の圧電振動子の表面粗さを示すグラフ、第6図
は本考案に係る圧電振動子の表面粗さを示すグラ
フである。
1…ポリイミド樹脂による保護層、21,22
…銀電極、3…圧電セラミツクス。
Fig. 1 is a perspective view showing an embodiment of a piezoelectric vibrator according to the present invention, Fig. 2 is a cross-sectional view of Fig. 1, and Fig. 3 is a vertical cross-sectional view of a conventional piezoelectric vibrator provided with a metal film. , FIG. 4 is a vertical cross-sectional view of a conventional piezoelectric vibrator provided with a glass layer, FIG. 5 is a graph showing the surface roughness of a conventional piezoelectric vibrator provided with a glass layer, and FIG. 6 is a graph showing the surface roughness of a conventional piezoelectric vibrator provided with a glass layer. It is a graph showing the surface roughness of a piezoelectric vibrator. 1...Protective layer made of polyimide resin, 21, 22
...silver electrode, 3...piezoelectric ceramics.
Claims (1)
振動子において、 前記保護層としてポリイミド系樹脂を用いてあ
ることを特徴とする圧電振動子。[Claims for Utility Model Registration] A piezoelectric vibrator comprising a protective layer provided on an electrode on an ultrasonic emission surface, characterized in that a polyimide resin is used as the protective layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14516388U JPH0266276U (en) | 1988-11-07 | 1988-11-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14516388U JPH0266276U (en) | 1988-11-07 | 1988-11-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0266276U true JPH0266276U (en) | 1990-05-18 |
Family
ID=31413515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14516388U Pending JPH0266276U (en) | 1988-11-07 | 1988-11-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0266276U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04102680U (en) * | 1991-02-14 | 1992-09-04 | 株式会社東海理化電機製作所 | ultrasonic transducer |
WO2004085835A1 (en) * | 2003-03-27 | 2004-10-07 | Ngk Insulators, Ltd. | Liquid jet device and its manufacturing method |
-
1988
- 1988-11-07 JP JP14516388U patent/JPH0266276U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04102680U (en) * | 1991-02-14 | 1992-09-04 | 株式会社東海理化電機製作所 | ultrasonic transducer |
WO2004085835A1 (en) * | 2003-03-27 | 2004-10-07 | Ngk Insulators, Ltd. | Liquid jet device and its manufacturing method |