JPS63137452U - - Google Patents
Info
- Publication number
- JPS63137452U JPS63137452U JP3081087U JP3081087U JPS63137452U JP S63137452 U JPS63137452 U JP S63137452U JP 3081087 U JP3081087 U JP 3081087U JP 3081087 U JP3081087 U JP 3081087U JP S63137452 U JPS63137452 U JP S63137452U
- Authority
- JP
- Japan
- Prior art keywords
- base
- emitter
- supply pipe
- channel
- supplying gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000615 nonconductor Substances 0.000 claims description 2
- 239000003507 refrigerant Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3081087U JPH0353403Y2 (cg-RX-API-DMAC10.html) | 1987-03-03 | 1987-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3081087U JPH0353403Y2 (cg-RX-API-DMAC10.html) | 1987-03-03 | 1987-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63137452U true JPS63137452U (cg-RX-API-DMAC10.html) | 1988-09-09 |
| JPH0353403Y2 JPH0353403Y2 (cg-RX-API-DMAC10.html) | 1991-11-21 |
Family
ID=30835965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3081087U Expired JPH0353403Y2 (cg-RX-API-DMAC10.html) | 1987-03-03 | 1987-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353403Y2 (cg-RX-API-DMAC10.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009016354A (ja) * | 2007-07-06 | 2009-01-22 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | モジュラガスイオン源 |
| WO2009147894A1 (ja) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
-
1987
- 1987-03-03 JP JP3081087U patent/JPH0353403Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009016354A (ja) * | 2007-07-06 | 2009-01-22 | Ict Integrated Circuit Testing Ges Fuer Halbleiterprueftechnik Mbh | モジュラガスイオン源 |
| WO2009147894A1 (ja) * | 2008-06-05 | 2009-12-10 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
| JP5097823B2 (ja) * | 2008-06-05 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353403Y2 (cg-RX-API-DMAC10.html) | 1991-11-21 |