JPS63136867U - - Google Patents
Info
- Publication number
- JPS63136867U JPS63136867U JP2852887U JP2852887U JPS63136867U JP S63136867 U JPS63136867 U JP S63136867U JP 2852887 U JP2852887 U JP 2852887U JP 2852887 U JP2852887 U JP 2852887U JP S63136867 U JPS63136867 U JP S63136867U
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- polishing
- carrier
- rotating shaft
- abrasive liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 238000005498 polishing Methods 0.000 claims description 10
- 239000006061 abrasive grain Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2852887U JPH0731960Y2 (ja) | 1987-02-27 | 1987-02-27 | 平面研削研磨装置の砥液供給機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2852887U JPH0731960Y2 (ja) | 1987-02-27 | 1987-02-27 | 平面研削研磨装置の砥液供給機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136867U true JPS63136867U (enrdf_load_stackoverflow) | 1988-09-08 |
| JPH0731960Y2 JPH0731960Y2 (ja) | 1995-07-26 |
Family
ID=30831576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2852887U Expired - Lifetime JPH0731960Y2 (ja) | 1987-02-27 | 1987-02-27 | 平面研削研磨装置の砥液供給機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731960Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-27 JP JP2852887U patent/JPH0731960Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0731960Y2 (ja) | 1995-07-26 |
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