JPS63135963U - - Google Patents

Info

Publication number
JPS63135963U
JPS63135963U JP2430387U JP2430387U JPS63135963U JP S63135963 U JPS63135963 U JP S63135963U JP 2430387 U JP2430387 U JP 2430387U JP 2430387 U JP2430387 U JP 2430387U JP S63135963 U JPS63135963 U JP S63135963U
Authority
JP
Japan
Prior art keywords
tank
evaporation tank
evaporation
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2430387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2430387U priority Critical patent/JPS63135963U/ja
Publication of JPS63135963U publication Critical patent/JPS63135963U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2430387U 1987-02-23 1987-02-23 Pending JPS63135963U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2430387U JPS63135963U (enrdf_load_stackoverflow) 1987-02-23 1987-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2430387U JPS63135963U (enrdf_load_stackoverflow) 1987-02-23 1987-02-23

Publications (1)

Publication Number Publication Date
JPS63135963U true JPS63135963U (enrdf_load_stackoverflow) 1988-09-07

Family

ID=30823415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2430387U Pending JPS63135963U (enrdf_load_stackoverflow) 1987-02-23 1987-02-23

Country Status (1)

Country Link
JP (1) JPS63135963U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174458A (en) * 1981-04-22 1982-10-27 Mitsubishi Heavy Ind Ltd Construction of vessel for evaporating source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174458A (en) * 1981-04-22 1982-10-27 Mitsubishi Heavy Ind Ltd Construction of vessel for evaporating source

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