JPS6422767U - - Google Patents

Info

Publication number
JPS6422767U
JPS6422767U JP11782387U JP11782387U JPS6422767U JP S6422767 U JPS6422767 U JP S6422767U JP 11782387 U JP11782387 U JP 11782387U JP 11782387 U JP11782387 U JP 11782387U JP S6422767 U JPS6422767 U JP S6422767U
Authority
JP
Japan
Prior art keywords
hearth liner
crucible
vacuum evaporation
holds
hearth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11782387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11782387U priority Critical patent/JPS6422767U/ja
Publication of JPS6422767U publication Critical patent/JPS6422767U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11782387U 1987-07-31 1987-07-31 Pending JPS6422767U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11782387U JPS6422767U (enrdf_load_stackoverflow) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11782387U JPS6422767U (enrdf_load_stackoverflow) 1987-07-31 1987-07-31

Publications (1)

Publication Number Publication Date
JPS6422767U true JPS6422767U (enrdf_load_stackoverflow) 1989-02-06

Family

ID=31361617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11782387U Pending JPS6422767U (enrdf_load_stackoverflow) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPS6422767U (enrdf_load_stackoverflow)

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