JPS63135171U - - Google Patents
Info
- Publication number
- JPS63135171U JPS63135171U JP2680887U JP2680887U JPS63135171U JP S63135171 U JPS63135171 U JP S63135171U JP 2680887 U JP2680887 U JP 2680887U JP 2680887 U JP2680887 U JP 2680887U JP S63135171 U JPS63135171 U JP S63135171U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- circular
- electrodes
- pair
- resistance measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Description
第１図ａは本考案の一実施例装置の構造を示す
平面図、第１図ｂは第１図ａのＸ―Ｘ′線に沿う
平面で切断した断面図、第２図ａ及びｂはそれぞ
れ従来装置の構造例を示す平面図及び断面図であ
る。
１……オーミツク接触した電極（小電極）、２
……オーミツク接触した電極、３……絶縁膜、４
……半導体基板、Ａ……電極２の外部引き出し用
パツド金属層、Ｂ……オーミツク電極１を連絡す
る金属層。
Fig. 1a is a plan view showing the structure of an embodiment of the device of the present invention, Fig. 1b is a cross-sectional view taken along the line XX' of Fig. 1a, and Figs. FIG. 2 is a plan view and a cross-sectional view, respectively, showing a structural example of a conventional device. 1... Electrode in ohmic contact (small electrode), 2
...Electrode in ohmic contact, 3...Insulating film, 4
. . . Semiconductor substrate, A . . . Pad metal layer for external extraction of electrode 2, B . . . Metal layer connecting ohmic electrode 1.
Claims (1)
成した抵抗測定用の１対の電極を備え、 該１対の電極の一方の電極は円形または矩形に
し、他方の電極は上記円形または矩形電極の外側
に該電極をとり囲むように配置された複数個の電
極を、金属によつて連結して構成したことを特徴
とする接触比抵抗測定装置。[Claims for Utility Model Registration] A device comprising a pair of electrodes for resistance measurement formed on a semiconductor substrate to be subjected to contact specific resistance measurement, one electrode of the pair of electrodes having a circular or rectangular shape, and the other electrode having a circular or rectangular shape. A contact resistivity measuring device characterized in that the electrode is constituted by a plurality of electrodes arranged outside the circular or rectangular electrode so as to surround the electrode and connected by metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2680887U JPS63135171U (en) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2680887U JPS63135171U (en) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63135171U true JPS63135171U (en) | 1988-09-05 |
Family
ID=30828239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2680887U Pending JPS63135171U (en) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63135171U (en) |
-
1987
- 1987-02-24 JP JP2680887U patent/JPS63135171U/ja active Pending
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