JPS6070075U - Electrode for metal film resistance measurement - Google Patents

Electrode for metal film resistance measurement

Info

Publication number
JPS6070075U
JPS6070075U JP16154583U JP16154583U JPS6070075U JP S6070075 U JPS6070075 U JP S6070075U JP 16154583 U JP16154583 U JP 16154583U JP 16154583 U JP16154583 U JP 16154583U JP S6070075 U JPS6070075 U JP S6070075U
Authority
JP
Japan
Prior art keywords
electrode
metal film
film resistance
resistance measurement
center point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16154583U
Other languages
Japanese (ja)
Other versions
JPH0424454Y2 (en
Inventor
正美 高橋
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP16154583U priority Critical patent/JPS6070075U/en
Publication of JPS6070075U publication Critical patent/JPS6070075U/en
Application granted granted Critical
Publication of JPH0424454Y2 publication Critical patent/JPH0424454Y2/ja
Granted legal-status Critical Current

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  • Measurement Of Resistance Or Impedance (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、第２図は従来の電極を用いて測定する場合の電
極配置の平面図、第３図は本考案の実施例の電極配置の
側面断面図、第４図、第５図は本考案による電極部のみ
を示す電極配置平面図である。なお図において、 １・・・・・・固定電極、２・・・・・・移動電極、３
・・・・・・リード線、４・・・・・・試験片、５・・
・・・・中心導体、６・・・・・・誘電体、７・・・・
・・金属膜、１１・・・・・・外電極、１２，１３・・
・・・・内電極である。Figures 1 and 2 are plan views of the electrode arrangement when measuring using conventional electrodes, Figure 3 is a side sectional view of the electrode arrangement according to the embodiment of the present invention, and Figures 4 and 5 are of the present invention. FIG. 3 is a plan view of the electrode arrangement showing only the electrode portion according to the invention. In the figure, 1... Fixed electrode, 2... Moving electrode, 3
...Lead wire, 4...Test piece, 5...
...Center conductor, 6...Dielectric, 7...
...Metal film, 11... Outer electrode, 12, 13...
...It is an inner electrode.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 底面が円形状の内電極と、この内電極の中心点と一致し
た中心点をもちかつこの内電極よりも大きな内径の円環
状の底面をもつ外電極とを備え、前記各底面を測定すべ
き金属膜に接触できるように構成した金属膜抵抗測定用
電極。An inner electrode having a circular bottom surface and an outer electrode having a circular bottom surface whose center point coincides with the center point of the inner electrode and whose inner diameter is larger than that of the inner electrode, and each of the bottom surfaces should be measured. An electrode for measuring metal film resistance configured so that it can come into contact with metal films.
JP16154583U 1983-10-19 1983-10-19 Electrode for metal film resistance measurement Granted JPS6070075U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16154583U JPS6070075U (en) 1983-10-19 1983-10-19 Electrode for metal film resistance measurement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16154583U JPS6070075U (en) 1983-10-19 1983-10-19 Electrode for metal film resistance measurement

Publications (2)

Publication Number Publication Date
JPS6070075U true JPS6070075U (en) 1985-05-17
JPH0424454Y2 JPH0424454Y2 (en) 1992-06-09

Family

ID=30354995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16154583U Granted JPS6070075U (en) 1983-10-19 1983-10-19 Electrode for metal film resistance measurement

Country Status (1)

Country Link
JP (1) JPS6070075U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249482A (en) * 2007-03-30 2008-10-16 Tokyo Electron Ltd Measuring system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470U (en) * 1974-09-17 1976-03-23

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470B2 (en) * 1972-01-21 1976-10-21 Nippon Kokan Kk

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138470U (en) * 1974-09-17 1976-03-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008249482A (en) * 2007-03-30 2008-10-16 Tokyo Electron Ltd Measuring system

Also Published As

Publication number Publication date
JPH0424454Y2 (en) 1992-06-09

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