JPS63133619A - 化合物半導体の液相エピタキシヤル成長法 - Google Patents
化合物半導体の液相エピタキシヤル成長法Info
- Publication number
- JPS63133619A JPS63133619A JP61281056A JP28105686A JPS63133619A JP S63133619 A JPS63133619 A JP S63133619A JP 61281056 A JP61281056 A JP 61281056A JP 28105686 A JP28105686 A JP 28105686A JP S63133619 A JPS63133619 A JP S63133619A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- substrate
- compound semiconductor
- metal solution
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61281056A JPS63133619A (ja) | 1986-11-26 | 1986-11-26 | 化合物半導体の液相エピタキシヤル成長法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61281056A JPS63133619A (ja) | 1986-11-26 | 1986-11-26 | 化合物半導体の液相エピタキシヤル成長法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63133619A true JPS63133619A (ja) | 1988-06-06 |
| JPH0260209B2 JPH0260209B2 (cg-RX-API-DMAC10.html) | 1990-12-14 |
Family
ID=17633691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61281056A Granted JPS63133619A (ja) | 1986-11-26 | 1986-11-26 | 化合物半導体の液相エピタキシヤル成長法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133619A (cg-RX-API-DMAC10.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579919U (ja) * | 1992-03-31 | 1993-10-29 | 株式会社トーキン | ベース |
-
1986
- 1986-11-26 JP JP61281056A patent/JPS63133619A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260209B2 (cg-RX-API-DMAC10.html) | 1990-12-14 |
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