JPS63130790A - Improved electrolytic cell - Google Patents
Improved electrolytic cellInfo
- Publication number
- JPS63130790A JPS63130790A JP61276795A JP27679586A JPS63130790A JP S63130790 A JPS63130790 A JP S63130790A JP 61276795 A JP61276795 A JP 61276795A JP 27679586 A JP27679586 A JP 27679586A JP S63130790 A JPS63130790 A JP S63130790A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- partition plate
- electrolytic cell
- anode
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims abstract description 28
- 238000005868 electrolysis reaction Methods 0.000 abstract description 8
- 150000003839 salts Chemical class 0.000 abstract description 7
- 238000005260 corrosion Methods 0.000 abstract description 5
- 230000007797 corrosion Effects 0.000 abstract description 5
- 238000004880 explosion Methods 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- -1 polytetrafluoroethylene Polymers 0.000 abstract description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 40
- 210000004027 cell Anatomy 0.000 description 13
- NROKBHXJSPEDAR-UHFFFAOYSA-M potassium fluoride Chemical compound [F-].[K+] NROKBHXJSPEDAR-UHFFFAOYSA-M 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 235000003270 potassium fluoride Nutrition 0.000 description 4
- 239000011698 potassium fluoride Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 210000005056 cell body Anatomy 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 239000002360 explosive Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 210000004185 liver Anatomy 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920001780 ECTFE Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、溶融塩電解法による三弗化窒素ガス（ＮＦ３
）や弗素ガス（Ｆ２）の製造の際に使用される電解槽の
改良に関する。Detailed Description of the Invention (Industrial Application Field) The present invention is directed to the production of nitrogen trifluoride gas (NF3) by molten salt electrolysis.
) and fluorine gas (F2).
（従来の技術）
酸性フッ化アンモニウムまたはフッ化アンモニウムと弗
化水素を原料とするＮＨ４Ｆ・肝系や、これに更に酸性
フッ化カリウムまたはフッ化カリウムを原料として加え
たＫＦ −ＮＨ４Ｆ・肝系溶融塩電解法によるＮＦｓガ
スの製造、並びに酸性フッ化カリウムまたは弗化カリウ
ムと弗化水素を原料とするＫＦ −ＨＦ系溶融塩電解法
によるＦ２ガスの製造を行なう場合、電解槽には陽極か
ら発生するガスと陰極から発生するガスを隔離するため
の隔板が設けられている。(Prior art) NH4F/liver system using acidic ammonium fluoride or ammonium fluoride and hydrogen fluoride as raw materials, and KF-NH4F/liver system melting using acidic potassium fluoride or potassium fluoride as raw materials. When producing NFs gas by salt electrolysis, or producing F2 gas by KF-HF molten salt electrolysis using acidic potassium fluoride or potassium fluoride and hydrogen fluoride as raw materials, the electrolytic tank contains gas generated from the anode. A partition plate is provided to separate the gas generated from the cathode and the gas generated from the cathode.
上記電解槽においては、陽極からはＮＦ３ガスまたはＦ
２ガスが、陰極からは水素ガス（Ｆ２）が発生する。こ
の二種類のガス、即ち、ＮＦ３ガスまたはＦ２ガスとＦ
２ガスは、混合すると爆発の危険性が極めて大きいので
、発生した二種類のガスの電解槽内での混合を防ぐ目的
で、陽極と陰極を隔離するための隔板が設けられている
。さらに、この隔板には電解浴に腐蝕されにくい鉄、銅
、ニッケルなどの金属板が通常使用されている。In the above electrolytic cell, NF3 gas or F
Hydrogen gas (F2) is generated from the cathode. These two types of gas, namely NF3 gas or F2 gas and F2 gas,
Since there is an extremely high risk of explosion when the two gases are mixed, a partition plate is provided to separate the anode and cathode in order to prevent the two gases from mixing in the electrolytic cell. Furthermore, a metal plate made of iron, copper, nickel, or the like, which is not easily corroded by an electrolytic bath, is usually used for this partition plate.
しかし、この様に電解槽には隔板を設けているにもかか
わらず、この電解槽を用いてＮＦ３ガスやＦ２ガスの製
造を行なうと、陽極から発生するＮＦ３ガスまたはＦ２
ガス中に少なからずＦ２ガスが混在してきて、爆発限界
内のガスが生成する場合がある。これは、溶融塩電解時
に隔板の複極化現象が起こり、複極化した隔板の陽極と
相対する面からＦ２ガスが発生し、このＦ２ガスがＮＦ
３ガスまたはＦ２ガスと混合し、爆発限界内の混合ガス
を生成するからである。However, even though the electrolytic cell is equipped with a partition plate in this way, when NF3 gas or F2 gas is produced using this electrolytic cell, the NF3 gas or F2 gas generated from the anode is
A considerable amount of F2 gas may be mixed in the gas, and gas within the explosive limit may be generated. This is because bipolarization of the diaphragm occurs during molten salt electrolysis, and F2 gas is generated from the surface of the bipolar diaphragm facing the anode, and this F2 gas becomes NF.
This is because it mixes with F3 gas or F2 gas to produce a mixed gas within the explosive limit.
そこで、このような爆発限界内の混合ガスの生成を防止
するため、従来は陽極発生ガス中にＮ２等の不活性ガス
を混入させ、陽極発生ガス中に混入するＮ２ガスの濃度
を低下させることで爆発の危険を回避する方法が取られ
て来た。Therefore, in order to prevent the generation of such a mixed gas within the explosive limit, conventional methods have been to mix an inert gas such as N2 into the anode generated gas to reduce the concentration of N2 gas mixed into the anode generated gas. Measures have been taken to avoid the risk of explosion.
（発明が解決しようとする問題点）
しかし、この方法は隔板の複極化を防止するという方法
ではないので、ＮＦ３ガスまたはＦ２ガス中に水素ガス
が混入したままであり、根本的な問題解決にはならず、
電解条件によっては依然爆発の危険性は残っている。更
に、隔板は、前記の通りその材質が鉄、銅、ニッケルな
どの金属板であるので、電解浴に腐蝕されにくいとはい
え、若干の腐蝕は免れ難いという問題もある。(Problem to be solved by the invention) However, since this method does not prevent bipolarization of the diaphragm, hydrogen gas remains mixed in the NF3 gas or F2 gas, which is a fundamental problem. It's not a solution,
Depending on the electrolysis conditions, there is still a risk of explosion. Furthermore, as mentioned above, the material of the partition plate is a metal plate made of iron, copper, nickel, etc., so although it is not easily corroded by the electrolytic bath, there is a problem that some corrosion is inevitable.
（問題点を解決するための手段）
本発明者等は、根本的な解決手段である隔板の複極化防
止について種々検討を重ねた結果、隔板の材質をフッ素
系樹脂とすれば隔板の複極化を防止することが可能で、
しかも隔板も腐蝕されないことを見出し、本発明を完成
させるに至ったものである。(Means for solving the problem) As a result of various studies on preventing bipolarization of the partition plate, which is a fundamental solution, the present inventors found that if the material of the partition plate is a fluororesin, It is possible to prevent the board from becoming bipolar,
Furthermore, the inventors discovered that the partition plates were not corroded, leading to the completion of the present invention.
すなわち、本発明は、陽極から発生するガスと陰極から
発生するガスを隔離するだめの隔板がフッ素系樹脂から
なることを特徴とする改良された電解槽である。That is, the present invention is an improved electrolytic cell characterized in that the partition plate that separates the gas generated from the anode and the gas generated from the cathode is made of a fluororesin.
本発明を図面に基いて更に詳細に説明する。The present invention will be explained in more detail based on the drawings.
陽極から発生するガスと陰極から発生するガスを隔離す
るための隔板の形状には色々なものがある。例えば、隔
板が平板状である場合、隔板が陽極または陰極を取り巻
く形状である場合などがあり、特殊な例としては、蓋板
の中央部が下方にＵ字形に折曲っていてこの折曲り部が
隔板の役割を果す形状のものもある。There are various shapes of the partition plate for separating the gas generated from the anode and the gas generated from the cathode. For example, the diaphragm may be flat, or the diaphragm may be shaped to surround an anode or a cathode. In special cases, the center of the lid plate may be bent downward into a U-shape. Some have a shape in which the bent portion acts as a partition.
第１図は隔板が平板状である場合の、第３図は隔板が陽
極を取り巻く形状である場合の、第５図は隔板が陰極を
取り巻く形状である場合の、第７図は隔板が陽極を取り
巻く形状でありかつ電解槽本体が陰極である場合の、第
９図は蓋板の中央部がＵ字形に折曲っていて該折曲り部
が隔板の役割を果たす形状の場合の、夫々の電解槽の縦
断面図であり、第２図は第１図の、第４図は第３図の、
第６図は第５図の、第８図は第７図の、第１０図は第９
図の、夫々のＡ−Ａ ′矢視図を示す。Figure 1 shows the case where the partition plate is flat, Figure 3 shows the case where the partition plate surrounds the anode, Figure 5 shows the case where the partition plate surrounds the cathode, and Figure 7 shows the case where the partition plate surrounds the cathode. In the case where the diaphragm is shaped to surround the anode and the electrolytic cell body is the cathode, Figure 9 shows a case where the central part of the lid plate is bent into a U-shape and the bent part plays the role of the diaphragm. FIG. 2 is a vertical cross-sectional view of each electrolytic cell in the case of FIG. 1, FIG.
Figure 6 is Figure 5, Figure 8 is Figure 7, Figure 10 is Figure 9.
A view along the arrow A-A' of the figure is shown.
この種の電解槽の中には、第１図〜第１０図に示す様に
、電解槽の底板部には底板の上にフッ素系樹脂板２が設
けてあって、底板の腐蝕を防止する様になっているもの
もある。また、陽極５または陰極６に接続されている接
続棒７ａ、７ｂと蓋板３とは絶縁材８ａ、８ｂで絶縁さ
れていて、更に接続棒７ａ、７ｂは、例えば、接続棒固
定用袋ナラ）９ａ、９ｂで蓋板３に間接的に固定されて
いる。In this type of electrolytic cell, as shown in Figures 1 to 10, a fluororesin plate 2 is provided on the bottom plate of the electrolytic cell to prevent corrosion of the bottom plate. There are some that look like this. Further, the connecting rods 7a, 7b connected to the anode 5 or the cathode 6 and the cover plate 3 are insulated with insulating materials 8a, 8b, and the connecting rods 7a, 7b are, for example, connected to a connecting rod fixing bag. ) 9a and 9b are indirectly fixed to the cover plate 3.
本発明の隔板に用いるフッ素系樹脂は、例えば、ポリテ
トラフルオロエチレン、ポリクロロトリフルオロエチレ
ン、ポリビニリデンフルオライド、ポリビニルフルオラ
イド、テトラフルオロエチレン−ヘキサフルオロプロピ
レン共重合体、テトラフルオロエチレン−エチレン共重
合体、テトラフルオロエチレン−パーフルオロアルキル
ビニルエーテル共重合体、クロロトリフルオロエチレン
−エチレン共重合体等通常公知のものが何れも好適に使
用可能である。Examples of the fluororesin used in the partition plate of the present invention include polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinylidene fluoride, polyvinyl fluoride, tetrafluoroethylene-hexafluoropropylene copolymer, and tetrafluoroethylene-ethylene copolymer. Any commonly known copolymer, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, chlorotrifluoroethylene-ethylene copolymer, etc. can be suitably used.
（作用及び発明の効果）
以上、詳細に説明したように、本発明の電解槽は、隔板
がフッ素系樹脂であるので、従来問題であった隔板の複
極化を完全に防止することが出来、これによって溶融塩
電解の際の陽極から発生するＮＦ３ガスやＦ２ガス中に
Ｎ２の混入を完全に防止することが可能となった。勿論
これによって爆発の問題も完全に解消できるので、溶融
塩電解によるＮＦ３やＦ２の工業的製造が可能となり、
その経済的効果は極めて大である。また隔板がフッ素系
樹脂であるので隔板の腐蝕も完全に防止出来る点も大い
に評価される。(Function and Effects of the Invention) As explained in detail above, in the electrolytic cell of the present invention, since the partition plate is made of fluororesin, bipolarization of the partition plate, which has been a problem in the past, can be completely prevented. This made it possible to completely prevent N2 from being mixed into the NF3 gas and F2 gas generated from the anode during molten salt electrolysis. Of course, this completely eliminates the problem of explosion, making it possible to industrially produce NF3 and F2 by molten salt electrolysis.
The economic effect is extremely large. Also, since the partition plates are made of fluororesin, corrosion of the partition plates can be completely prevented, which is highly appreciated.
第１図は隔板が平板上である場合の、第３図は隔板が陽
極を取り巻く形状である場合の、第５図は隔板が陰極を
取り巻く形状である場合の、第７図は隔板が陽極を取り
巻く形状でありかつ電解槽本体が陰極である場合の、第
９図は蓋板の中央部が下方にＵ字形に折曲っていて該折
曲り部が隔板の役割を果たす形状の場合の、夫々の電解
槽の縦断面図であり、第２図は第１図の、第４図は第３
図の、第６図は第５図の、第８図は第７図の、第１０図
は第９図の夫々のＡ−へ′矢視図を示す。
図において、
１−−一 電解槽本体、２−ｍ−フッ素系樹脂板、３−
−一 蓋板、 ４−−一電解浴、５−ｍ−陽極、
６−−−陰極、７ａ、７ｂ−−一 接続棒、８
ａ、８ｂ−−一絶縁材、９ａ、９ｂ−−一 接続棒固定
用袋ナツト、１０−ｍ−隔板、 １１−ｍ−隔板固
定用蓋板、１２−ｍ−陽極発生ガス出口管、
１３−ｍ−陰極発生ガス出口管、
１４−ｍ−パッキング、
１５−ｍ−蓋板用ボルトナット、
１６−−−隔板固定用ボルト、
を示す。
特許出願人 三井東圧化学株式会社第１図
第２図
第３図
第４図
第５図
第６図
第９図
手続補正書（放）
昭和６２年 ３月２日
特許庁長官 黒 １）明 雄 殿
１、事件の表示
昭和６１年特許願第２７６７９５号
２、発明の名称
改良された電解槽
３、補正をする者
事件との関係 特許出願人
住所 東京都千代田区霞が関三丁目２番５号名称 （
３１２） 三井東圧化学株式会社４、補正命令の日付
（発送日）
昭和６２年２月２４日
５、補正の対象
「願書の発明の名称の欄」および「明細書の発（２）明
細書第１頁３行目に「改良された電解槽（２）」とある
を、「改良された電解槽」と訂正する。
以 上Figure 1 shows the case where the diaphragm is on a flat plate, Figure 3 shows the case where the diaphragm surrounds the anode, Figure 5 shows the case where the diaphragm surrounds the cathode, and Figure 7 shows the case where the diaphragm surrounds the cathode. In a case where the diaphragm is shaped to surround the anode and the electrolytic cell body is the cathode, Figure 9 shows that the central part of the lid plate is bent downward into a U-shape, and this bent part plays the role of the diaphragm. FIG. 2 is a vertical cross-sectional view of each electrolytic cell in the case of the shape, and FIG.
In the figure, FIG. 6 is a view of FIG. 5, FIG. 8 is a view of FIG. 7, and FIG. 10 is a view taken along arrow A' in FIG. In the figure, 1--1 electrolytic cell body, 2-m-fluorine resin plate, 3-
-1 cover plate, 4-1 electrolytic bath, 5-m-anode,
6--Cathode, 7a, 7b--1 Connection rod, 8
a, 8b--insulating material, 9a, 9b--cap nut for fixing the connection rod, 10-m-diaphragm, 11-m-cover plate for fixing the partition plate, 12-m-anode generated gas outlet pipe, 13-m--cathode generated gas outlet pipe, 14-m-packing, 15-m-bolts and nuts for cover plate, 16--bolts for fixing partition plate. Patent applicant Mitsui Toatsu Chemical Co., Ltd. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 9 Procedural amendment (release) March 2, 1988 Commissioner of the Patent Office Black 1) Akira Mr. Yu 1, Indication of the case Patent Application No. 276795 filed in 1985 2, Electrolytic cell with improved name of the invention 3, Relationship with the person making the amendment Patent applicant address 3-2-5 Kasumigaseki, Chiyoda-ku, Tokyo Name (
312) Mitsui Toatsu Kagaku Co., Ltd. 4. Date of amendment order (shipment date) February 24, 1988 5. Target of amendment: ``Name of the invention in the application'' and ``Issuance of the specification (2) Specification.'' On page 1, line 3, the phrase "improved electrolytic cell (2)" has been corrected to "improved electrolytic cell."that's all
Claims (1)
離するための隔板がフッ素系樹脂からなることを特徴と
する改良された電解槽。1) An improved electrolytic cell characterized in that the partition plate for separating the gas generated from the anode and the gas generated from the cathode is made of a fluororesin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61276795A JPH0757915B2 (en) | 1986-11-21 | 1986-11-21 | Improved electrolyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61276795A JPH0757915B2 (en) | 1986-11-21 | 1986-11-21 | Improved electrolyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63130790A true JPS63130790A (en) | 1988-06-02 |
| JPH0757915B2 JPH0757915B2 (en) | 1995-06-21 |
Family
ID=17574482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61276795A Expired - Lifetime JPH0757915B2 (en) | 1986-11-21 | 1986-11-21 | Improved electrolyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0757915B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243400A (en) * | 1988-08-03 | 1990-02-13 | Mitsui Toatsu Chem Inc | Electrolytic cell |
| KR100286717B1 (en) * | 1998-06-30 | 2001-06-01 | 박호군 | Improved Method of Making Fluorine |
| KR20200080220A (en) * | 2017-10-31 | 2020-07-06 | 칸토 덴카 코교 가부시키가이샤 | Electrolyzer for nitrogen trifluoride gas production and its bulkhead |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5436152A (en) * | 1977-08-26 | 1979-03-16 | Nec Corp | Clock synchronization circuit between central processors |
| JPS58100688A (en) * | 1981-12-11 | 1983-06-15 | Asahi Glass Co Ltd | Electrolytic cell for generating fluorine |
| JPS60155502A (en) * | 1983-12-22 | 1985-08-15 | アライド・コーポレーシヨン | Fluorine electrolytic manufacture and novel electrolytic cell |
-
1986
- 1986-11-21 JP JP61276795A patent/JPH0757915B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5436152A (en) * | 1977-08-26 | 1979-03-16 | Nec Corp | Clock synchronization circuit between central processors |
| JPS58100688A (en) * | 1981-12-11 | 1983-06-15 | Asahi Glass Co Ltd | Electrolytic cell for generating fluorine |
| JPS60155502A (en) * | 1983-12-22 | 1985-08-15 | アライド・コーポレーシヨン | Fluorine electrolytic manufacture and novel electrolytic cell |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0243400A (en) * | 1988-08-03 | 1990-02-13 | Mitsui Toatsu Chem Inc | Electrolytic cell |
| KR100286717B1 (en) * | 1998-06-30 | 2001-06-01 | 박호군 | Improved Method of Making Fluorine |
| KR20200080220A (en) * | 2017-10-31 | 2020-07-06 | 칸토 덴카 코교 가부시키가이샤 | Electrolyzer for nitrogen trifluoride gas production and its bulkhead |
| JPWO2019087885A1 (en) * | 2017-10-31 | 2020-11-12 | 関東電化工業株式会社 | Electrolytic cell for producing nitrogen trifluoride gas and its partition wall |
| EP3705604A4 (en) * | 2017-10-31 | 2021-08-04 | Kanto Denka Kogyo Co., Ltd. | Electrolytic bath for producing nitrogen trifluoride gas, and partition therefor |
| US11401614B2 (en) | 2017-10-31 | 2022-08-02 | Kanto Denka Kogyo Co., Ltd. | Electrolytic cell for producing nitrogen trifluoride gas and partition therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0757915B2 (en) | 1995-06-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |