JPS63127974U - - Google Patents
Info
- Publication number
- JPS63127974U JPS63127974U JP1987019592U JP1959287U JPS63127974U JP S63127974 U JPS63127974 U JP S63127974U JP 1987019592 U JP1987019592 U JP 1987019592U JP 1959287 U JP1959287 U JP 1959287U JP S63127974 U JPS63127974 U JP S63127974U
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor wafer
- metal plate
- shaped jig
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987019592U JPS63127974U (enExample) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987019592U JPS63127974U (enExample) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127974U true JPS63127974U (enExample) | 1988-08-22 |
Family
ID=30814326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987019592U Pending JPS63127974U (enExample) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127974U (enExample) |
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1987
- 1987-02-12 JP JP1987019592U patent/JPS63127974U/ja active Pending