JPS63125820A - 静圧軸受 - Google Patents

静圧軸受

Info

Publication number
JPS63125820A
JPS63125820A JP27048486A JP27048486A JPS63125820A JP S63125820 A JPS63125820 A JP S63125820A JP 27048486 A JP27048486 A JP 27048486A JP 27048486 A JP27048486 A JP 27048486A JP S63125820 A JPS63125820 A JP S63125820A
Authority
JP
Japan
Prior art keywords
guide
bearing
pad
section
guide surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27048486A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321765B2 (cg-RX-API-DMAC10.html
Inventor
Katsunobu Ueda
上田　勝宣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP27048486A priority Critical patent/JPS63125820A/ja
Publication of JPS63125820A publication Critical patent/JPS63125820A/ja
Publication of JPH0321765B2 publication Critical patent/JPH0321765B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP27048486A 1986-11-13 1986-11-13 静圧軸受 Granted JPS63125820A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27048486A JPS63125820A (ja) 1986-11-13 1986-11-13 静圧軸受

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27048486A JPS63125820A (ja) 1986-11-13 1986-11-13 静圧軸受

Publications (2)

Publication Number Publication Date
JPS63125820A true JPS63125820A (ja) 1988-05-30
JPH0321765B2 JPH0321765B2 (cg-RX-API-DMAC10.html) 1991-03-25

Family

ID=17486936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27048486A Granted JPS63125820A (ja) 1986-11-13 1986-11-13 静圧軸受

Country Status (1)

Country Link
JP (1) JPS63125820A (cg-RX-API-DMAC10.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01305204A (ja) * 1988-06-03 1989-12-08 Hitachi Ltd 低圧給水加熱器
JPH0256915U (cg-RX-API-DMAC10.html) * 1988-10-18 1990-04-24
DE102004012204B3 (de) * 2004-03-12 2005-05-25 Siemens Ag Winkelluftlager mit linear zueinander verschiebbaren länglichen Führungsteilen
JP2008542638A (ja) * 2005-05-25 2008-11-27 シエツフレル コマンディートゲゼルシャフト 静圧式の支承装置
DE102005063326B4 (de) * 2005-02-24 2014-01-16 AeroLas GmbH Aerostatische Lager- Lasertechnik Aerostatisches Lager mit einem Lagerfuß
DE102018202772A1 (de) * 2018-02-23 2019-08-29 Carl Zeiss Industrielle Messtechnik Gmbh Halteeinrichtung für eine Luftlagereinrichtung, Koordinatenmessgerät sowie Verfahren zur Herstellung einer Halteeinrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5155572U (cg-RX-API-DMAC10.html) * 1974-10-25 1976-04-28
JPS59121524U (ja) * 1983-02-01 1984-08-16 オムロン株式会社 空気軸受パツト
JPS6193622U (cg-RX-API-DMAC10.html) * 1984-11-27 1986-06-17

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5155572U (cg-RX-API-DMAC10.html) * 1974-10-25 1976-04-28
JPS59121524U (ja) * 1983-02-01 1984-08-16 オムロン株式会社 空気軸受パツト
JPS6193622U (cg-RX-API-DMAC10.html) * 1984-11-27 1986-06-17

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01305204A (ja) * 1988-06-03 1989-12-08 Hitachi Ltd 低圧給水加熱器
JPH0256915U (cg-RX-API-DMAC10.html) * 1988-10-18 1990-04-24
DE102004012204B3 (de) * 2004-03-12 2005-05-25 Siemens Ag Winkelluftlager mit linear zueinander verschiebbaren länglichen Führungsteilen
DE102005063326B4 (de) * 2005-02-24 2014-01-16 AeroLas GmbH Aerostatische Lager- Lasertechnik Aerostatisches Lager mit einem Lagerfuß
JP2008542638A (ja) * 2005-05-25 2008-11-27 シエツフレル コマンディートゲゼルシャフト 静圧式の支承装置
DE102018202772A1 (de) * 2018-02-23 2019-08-29 Carl Zeiss Industrielle Messtechnik Gmbh Halteeinrichtung für eine Luftlagereinrichtung, Koordinatenmessgerät sowie Verfahren zur Herstellung einer Halteeinrichtung
DE102018202772B4 (de) 2018-02-23 2023-08-10 Carl Zeiss Industrielle Messtechnik Gmbh Halteeinrichtung für eine Luftlagereinrichtung, Koordinatenmessgerät sowie Verfahren zur Herstellung einer Halteeinrichtung

Also Published As

Publication number Publication date
JPH0321765B2 (cg-RX-API-DMAC10.html) 1991-03-25

Similar Documents

Publication Publication Date Title
US8333512B2 (en) Self-compensating hydrostatic planar bearing device and method thereof
US4227753A (en) Compliant gas thrust bearing with profiled and apertured thrust runner
JP5044461B2 (ja) 直動案内ユニット
KR940006245A (ko) 비접촉형 이동테이블
JP3950686B2 (ja) 転動体間にセパレータを備えた直動案内ユニット
JPS63125820A (ja) 静圧軸受
JP2009014177A (ja) ローラ形式の直動案内ユニット
CN114911018A (zh) 具有受支撑的挠曲接头的光学装置
JPS61290231A (ja) 静圧案内軸受
US3467447A (en) Ball way package
CN109215730B (zh) 一种基于柔性铰链的位移换向放大机构
US3475065A (en) Gas bearings of the linear motion single plane type
US4753540A (en) Mounting structure of a linear motion rolling contact bearing assembly
US3512848A (en) Machine bearing
KR940008032A (ko) 비접촉형 이동 테이블
JPH0647135Y2 (ja) エアスライド装置
JP4106392B2 (ja) 気体圧制御アクチュエータ、気体圧制御アクチュエータ用気体軸受機構及び気体圧制御アクチュエータを用いた微小変位出力装置
JPH04282021A (ja) 可動体の案内装置
US3781070A (en) Machine tool
JP4586378B2 (ja) 静圧気体直動軸受機構
KR101608361B1 (ko) 정압 기체 베어링 및 이 정압 기체 베어링을 이용한 직동 안내 장치
EP4089294A1 (en) Negative-pressure adsorption static-pressure supporting guide rail of machining machine tool, and cylindrical grinding machine comprising negative-pressure adsorption static-pressure supporting guide rail
JP7219877B2 (ja) 運動案内装置
CN116972067B (zh) 一种动静压混合箔片轴承及轴系
JP5404296B2 (ja) 気体軸受及び位置決め装置