JPS6312347B2 - - Google Patents

Info

Publication number
JPS6312347B2
JPS6312347B2 JP56031333A JP3133381A JPS6312347B2 JP S6312347 B2 JPS6312347 B2 JP S6312347B2 JP 56031333 A JP56031333 A JP 56031333A JP 3133381 A JP3133381 A JP 3133381A JP S6312347 B2 JPS6312347 B2 JP S6312347B2
Authority
JP
Japan
Prior art keywords
deflection
aberration
compensation
deflector
2gδφ
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56031333A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57147856A (en
Inventor
Koichi Kanetani
Norio Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP56031333A priority Critical patent/JPS57147856A/ja
Publication of JPS57147856A publication Critical patent/JPS57147856A/ja
Publication of JPS6312347B2 publication Critical patent/JPS6312347B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56031333A 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type Granted JPS57147856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56031333A JPS57147856A (en) 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56031333A JPS57147856A (en) 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type

Publications (2)

Publication Number Publication Date
JPS57147856A JPS57147856A (en) 1982-09-11
JPS6312347B2 true JPS6312347B2 (enrdf_load_stackoverflow) 1988-03-18

Family

ID=12328322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56031333A Granted JPS57147856A (en) 1981-03-06 1981-03-06 Deflecting device of automatic astigmation compensation type

Country Status (1)

Country Link
JP (1) JPS57147856A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2571994B1 (fr) * 1984-10-22 1986-12-26 Soudure Autogene Francaise Machine pour le soudage interne de tubes bout a bout, par faisceau d'electrons
JPS6288247A (ja) * 1985-10-14 1987-04-22 Fujitsu Ltd 電子ビ−ム露光装置
JP2580114B2 (ja) * 1985-12-17 1997-02-12 株式会社日立製作所 偏向回路
JPH01296552A (ja) * 1988-05-24 1989-11-29 Hitachi Ltd イオンおよび電子ビーム複合装置
EP1120809B1 (en) * 2000-01-27 2012-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Objective lens for a charged particle beam device
JP6009981B2 (ja) * 2013-03-28 2016-10-19 日本電子株式会社 荷電粒子ビーム偏向装置
JP7155393B2 (ja) * 2019-03-08 2022-10-18 株式会社日立ハイテク 荷電粒子ビーム装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURRAL.OF.PHYSICS.E.SCIENTIFIC.LNSTRUNENTS.VOL.13=1980 *

Also Published As

Publication number Publication date
JPS57147856A (en) 1982-09-11

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