JPS6312154U - - Google Patents
Info
- Publication number
- JPS6312154U JPS6312154U JP10506186U JP10506186U JPS6312154U JP S6312154 U JPS6312154 U JP S6312154U JP 10506186 U JP10506186 U JP 10506186U JP 10506186 U JP10506186 U JP 10506186U JP S6312154 U JPS6312154 U JP S6312154U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- plate
- parallel
- ion beam
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 19
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 238000002513 implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000000605 extraction Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10506186U JPS6312154U (enrdf_load_stackoverflow) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10506186U JPS6312154U (enrdf_load_stackoverflow) | 1986-07-09 | 1986-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312154U true JPS6312154U (enrdf_load_stackoverflow) | 1988-01-26 |
Family
ID=30979134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10506186U Pending JPS6312154U (enrdf_load_stackoverflow) | 1986-07-09 | 1986-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312154U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07284346A (ja) * | 1994-04-18 | 1995-10-31 | Hatsuta Kogyo Kk | 温室用ビニールハウスのビニール張り方法およびその装置ならびにこの装置に使用するウインチ |
-
1986
- 1986-07-09 JP JP10506186U patent/JPS6312154U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07284346A (ja) * | 1994-04-18 | 1995-10-31 | Hatsuta Kogyo Kk | 温室用ビニールハウスのビニール張り方法およびその装置ならびにこの装置に使用するウインチ |
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