JPS631206A - Piezoelectric vibration bar - Google Patents
Piezoelectric vibration barInfo
- Publication number
- JPS631206A JPS631206A JP14454086A JP14454086A JPS631206A JP S631206 A JPS631206 A JP S631206A JP 14454086 A JP14454086 A JP 14454086A JP 14454086 A JP14454086 A JP 14454086A JP S631206 A JPS631206 A JP S631206A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- serving
- film
- oscillation frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims description 11
- 239000012528 membrane Substances 0.000 claims description 5
- 230000003647 oxidation Effects 0.000 abstract description 6
- 238000007254 oxidation reaction Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- 230000010355 oscillation Effects 0.000 abstract 4
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000007774 longterm Effects 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- -1 oxidation Substances 0.000 description 1
- 238000012802 pre-warming Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電圧Ｓ動片に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a voltage S moving piece.
圧電振動片の振動数の調整方法は、振動数を測定しなが
ら重りを付着していく方法と、あらかしめ重りを付着し
ておき、これをレーザービームでトリミングして調整す
る方法がある。通常これらの重り付は部の膜構造として
は、第２図（ａｌのように第１Ｎには、水晶と密着のよ
いＣｒＪＰＴｉ等の金属を用い、第２層には、第１層よ
り化学的に安定な金属であるＡｕ、Ａｇ等の金属が使わ
れていた。さらに振動数ｔＩ！整を目的とする最も膜厚
の厚い重り材としての第３層にも、湿式メツキあるいは
蒸着・スパッタ等の乾式メツキにより、Ａｕ、Ａｇなど
がｉ吏ねれていた。また、−Ｆｌｕ的な最も膜厚の厚い
重り材としての金属は、レーザーにより振動数を調整す
る方法では、レーザーによる熱衝撃や加工歪、膜の酸化
等により、重り材の金属が劣化しやすい為、Ａｕが使用
され、重りを付着しながら振動数を調整する場合には、
Ａｇが使用されていた。There are two ways to adjust the frequency of a piezoelectric vibrating piece: one is to attach a weight while measuring the frequency, and the other is to attach a pre-warming weight and adjust it by trimming it with a laser beam. Normally, the film structure of these weighted parts is as shown in Figure 2 (al).The first layer is made of a metal such as CrJPTi, which has good adhesion to the crystal, and the second layer is made of a metal that is more chemically bonded than the first layer. Stable metals such as Au and Ag were used for this purpose.Furthermore, the third layer, which is the thickest weight material for the purpose of adjusting the frequency tI, was formed using wet plating, vapor deposition, sputtering, etc. Au, Ag, etc. were damaged by dry plating.Furthermore, metals used as weight materials with -Flu, which have the thickest film thickness, cannot be used with the method of adjusting the frequency using a laser, due to the thermal shock caused by the laser. Since the metal of the weight material easily deteriorates due to processing distortion, oxidation of the film, etc., Au is used and when adjusting the frequency while attaching the weight,
Ag was used.
〔発明が解決しようとする問題点３
以上のように従来技術では、重り材として、貴金属が大
量に使用されていた為、振動片が高価なものとなってし
まっていた。この為、重り付は金属材料の低価格化が検
討されていた。しかし、最も膜厚の厚い層の単純な金属
材料の変更では振動子としての特性が低下してしまった
。たとえば、音叉型水晶振動片についてレーザーによる
振動数調整方法の場合の、第２図（ａｌで、重り材１３
がＡＵの場合とＡｇの場合の熱による振動数の変化と振
動数の長期安定性（エージング特性）を第２０ｆｂｌ、
ｆｃｌに示した。このように第２図（ａｌの重り材１３
を、たとえばＡｕはＡｇに、ＡｇはＣｕやＡ１等に変更
した場合、金属の酸化やガス吸着等が多くなり、これに
より振動子としての特性が劣化してしまっていた。そこ
で本発明は、この様な問題点を解決するもので、その目
的とするところは高品質で安価な圧電振動片を提供する
ところにある。[Problem 3 to be solved by the invention As described above, in the prior art, a large amount of precious metal was used as a weight material, which resulted in an expensive vibrating piece. For this reason, consideration was given to lowering the cost of metal materials for weights. However, by simply changing the metal material of the thickest layer, the characteristics as a vibrator deteriorated. For example, in the case of the frequency adjustment method using a laser for a tuning fork type crystal vibrating piece, the weight material 13 is shown in Fig. 2 (al).
The change in frequency due to heat and the long-term stability of frequency (aging characteristics) in the case of AU and Ag are shown in the 20th fbl,
It was shown in fcl. In this way, as shown in Fig. 2 (al weight material 13
For example, when Au is changed to Ag, Ag is changed to Cu, A1, etc., metal oxidation and gas adsorption increase, resulting in deterioration of the characteristics as a vibrator. The present invention is intended to solve these problems, and its purpose is to provide a high quality and inexpensive piezoelectric vibrating piece.
本発明の圧電振動片は、圧電振動片の振動数調整の為の
重り部の膜構造が最も膜厚の厚い重り材としての金属膜
の上に、化学的により安定な金属を付着した膜構造とす
ることを特徴とする。The piezoelectric vibrating piece of the present invention has a film structure in which a chemically more stable metal is adhered to a metal film serving as the thickest weight material in the weight part for adjusting the frequency of the piezoelectric vibrating piece. It is characterized by:
本発明の上記の構造によれば、重り材としての最も膜厚
の厚い金属の上に、化学的により安定な金属を付着する
ことによって、振動片の品質は保たれ、重り付は材料の
価格も低下できるのである。According to the above structure of the present invention, the quality of the vibrating element is maintained by attaching a chemically more stable metal on top of the metal with the thickest film thickness as the weight material, and the weight is lower than the cost of the material. can also be lowered.
以下本発明の圧電振動片について、一実施例を音叉型水
晶振動片により第１図（ａｌ ｆｂｌ ｆｃｌで詳細に
説明する。ここでは、レーザーによる振動数調整の場合
について述べる。Hereinafter, an embodiment of the piezoelectric vibrating piece of the present invention will be described in detail using a tuning fork type crystal vibrating piece with reference to FIG.
第１図ｆｉｌは、レーザーにより振動数調整を行なう音
叉型水晶振動片の外観図である。ｌは電極膜、２は重り
部の膜、３はレーザー加工後の加工面である。FIG. 1 fil is an external view of a tuning fork type crystal vibrating piece whose frequency is adjusted by a laser. 1 is an electrode film, 2 is a weight portion film, and 3 is a processed surface after laser processing.
第１図Ｔｏｌに４−４′断面で本発明の重り部の膜構造
を詳細に示す。第１層１はＣｒ０．０５μ、第２層２は
、６．ｕＱ、 １μ、第３７ｉ３はＡｇ１μ、第４Ｎ
４はＡｕｇ、１μである。本来振動数調整が目的である
ため最も膜厚の厚いＡｇの上に化学的により安定な金属
としてＡｕを付着し、Ａｇの酸化やガス吸着を防止す北
ことにより、レーザー加工後、マウント・封入して完成
した振動子の熱による振動数の変化及び振動数の長期安
定性は、第１図（Ｃ１の様に品質の高い物となった。膜
厚については実施例に限らず、特に第３ＮのＡｇは０．
２〜５μ、第４ＮのＡｕは０．０３−０．２＃でよい、
また膜構成についても実施例に限らず、層の数が３以上
ならよい。FIG. 1 Tol shows in detail the membrane structure of the weight portion of the present invention in section 4-4'. The first layer 1 is made of Cr0.05μ, and the second layer 2 is made of 6. uQ, 1μ, 37th i3 is Ag1μ, 4th N
4 is Aug, 1μ. Since the original purpose is to adjust the frequency, Au is attached as a chemically more stable metal on top of the thickest Ag film to prevent oxidation and gas adsorption of Ag. After laser processing, mounting and encapsulation are possible. The frequency change due to heat and the long-term stability of the frequency of the completed vibrator were of high quality as shown in Figure 1 (C1). 3N Ag is 0.
2-5μ, 4th N Au may be 0.03-0.2#,
Further, the film structure is not limited to the embodiments, and any number of layers may be used as long as the number of layers is three or more.
またこれは、レーザーでの振動数調整に限らず、膜付着
により振動数を調整する場合でも同様であり、また最も
膜厚の厚い膜としてＡｇ、Ｃｕ、Ａ１、Ｓｕ、、Ｐｂ等
のいずれかを付着し、その上に化学的により安定な金属
としてＡｕ、Ａｇ、Ｐｂ、Ｐｈ、Ｐｔ等のうちいずれか
を付着する場合にも前記安定な金属のみで最も厚い膜と
した時と全く同様の特性が得られる。Moreover, this is not limited to frequency adjustment using a laser, but also applies to the case where the frequency is adjusted by film attachment. When depositing a chemically more stable metal such as Au, Ag, Pb, Ph, Pt, etc. on it, the process is exactly the same as when forming the thickest film using only the stable metal. characteristics are obtained.
また、音叉型以外の水晶およびＬｉＴａ０．、ＬｉＮｂ
Ｏ５、圧電セラミック等の圧電性による振動片について
行なっても、なんら問題はない。In addition, crystals other than tuning fork type and LiTa0. , LiNb
There is no problem in using a piezoelectric vibrating element such as O5 or piezoelectric ceramic.
以上述べたように本発明によれば、圧電振動片の重り付
は部に化学的に安定度の低い安価な金属を用いることに
より金属の酸化、ガス吸着等による特性の劣化を防ぐた
めに、最も膜厚の厚い重り材としての金属膜の上に化学
的により安定な金属を付着することにより、酸化、ガス
吸着等を防止し、総合的に安価で高品質の振動片を提供
できるのである。As described above, according to the present invention, the piezoelectric vibrating piece is weighted using an inexpensive metal with low chemical stability, so as to prevent deterioration of characteristics due to metal oxidation, gas adsorption, etc. By attaching a chemically more stable metal onto a thick metal film as a weight material, oxidation, gas adsorption, etc. can be prevented, and a vibrating piece of high quality can be provided at an overall low cost.
第１図ｆｃｌは本発明の圧電振動片の一実施例を示す外
観図。
１・・・・・・電極膜
２・・・・・・重り部の膜
３・・・・・・レーザー加工後の加工面第１図（ｂｌは
、第１［ｆｆ１Ｆａｌにおける４−４′の断面図。
１・・・・・・Ｃｒ
２・・・・・・Ａｕ
３・・・・・・Ａｇ
４・・・・・・Ａｕ
５・・・・・・水晶
第１図（Ｃ１は、本発明の圧？ｉｌｉ振動片の振動子と
しての特性の一例であり、熱による（８０℃×９６Ｈ）
振動数の変化及び、振動数の長期安定性（エージング：
３０日）を示すグラフ。
第２図ｆａ＋は、従来の圧ＳＬ振動片の一例を示す重り
部の断面図。
１１・・・・・・Ｃｒ
１２・・・・・・Ａｕ
１３・・・・・・Ａｕ
第２図（ｂｌは、従来の圧電振動片の振動子としての特
性の一例であり、熱による（８０℃×９６Ｈ）振動数の
変化について、第２図ｆａｔ １３が、Ａｕの場合とＡ
ｇの場合のグラフ。
第２図（ｃｌは、従来の圧電振動片の振動子としての特
性の一例であり、振動数の長期安定性（エージング：３
０日）の第２図＋ａｌ１３が、Ａｕの場合とＡｇの場合
のグラフ。
以 上FIG. 1fcl is an external view showing an embodiment of the piezoelectric vibrating piece of the present invention. 1...Electrode film 2...Membrane of weight portion 3...Processed surface after laser processing Fig. 1 (bl is 4-4' in the first [ff1Fal) Cross-sectional view. 1...Cr 2...Au 3...Ag 4...Au 5...Crystal Figure 1 (C1 is This is an example of the characteristics of the pressure-ili vibrator of the present invention as a vibrator, and is caused by heat (80°C x 96H).
Changes in frequency and long-term stability of frequency (aging:
30 days). FIG. 2 fa+ is a sectional view of a weight part showing an example of a conventional pressure SL vibrating piece. 11...Cr 12...Au 13...Au Figure 2 (bl is an example of the characteristics of a conventional piezoelectric vibrating piece as a vibrator; 80°C
Graph for g. Figure 2 (cl is an example of the characteristics of a conventional piezoelectric vibrating piece as a vibrator, and the long-term stability of the frequency (aging: 3
0 days) Figure 2 + al13 is a graph when Au and Ag. that's all
Claims (1)
造が、最も膜厚の厚い重り材としての金属膜上に、化学
的により安定な金属を付着した膜構造をとることを特徴
とする圧電振動片。In the piezoelectric vibrating piece, the membrane structure of the weight part for frequency adjustment is characterized by having a membrane structure in which a chemically more stable metal is adhered to the thickest metal membrane as the weight material. Piezoelectric vibrating piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61144540A JP2678901B2 (en) | 1986-06-20 | 1986-06-20 | Tuning fork crystal vibrating piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61144540A JP2678901B2 (en) | 1986-06-20 | 1986-06-20 | Tuning fork crystal vibrating piece |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9137970A Division JP2995550B2 (en) | 1997-05-14 | 1997-05-14 | Manufacturing method of crystal resonator element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631206A true JPS631206A (en) | 1988-01-06 |
| JP2678901B2 JP2678901B2 (en) | 1997-11-19 |
Family
ID=15364678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61144540A Expired - Lifetime JP2678901B2 (en) | 1986-06-20 | 1986-06-20 | Tuning fork crystal vibrating piece |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2678901B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316408A (en) * | 1989-06-14 | 1991-01-24 | Murata Mfg Co Ltd | Resonance frequency adjustment method for piezoelectric tuning fork vibration |
| JP2007096899A (en) * | 2005-09-29 | 2007-04-12 | Seiko Epson Corp | Manufacturing method and bonding structure of piezoelectric vibration piece, and piezoelectric device |
| JP2007243435A (en) * | 2006-03-07 | 2007-09-20 | Daishinku Corp | Piezoelectric resonator chip and frequency adjustment method for same |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51107078A (en) * | 1975-03-17 | 1976-09-22 | Tdk Electronics Co Ltd | Atsudenshindoshino seizohoho |
| JPS53131792A (en) * | 1977-04-22 | 1978-11-16 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
| JPS5561124A (en) * | 1978-10-31 | 1980-05-08 | Seiko Instr & Electronics Ltd | Composite vibrator |
| JPS562451A (en) * | 1979-06-20 | 1981-01-12 | Nippon Carbureter Co Ltd | Carburetor using air valve |
-
1986
- 1986-06-20 JP JP61144540A patent/JP2678901B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51107078A (en) * | 1975-03-17 | 1976-09-22 | Tdk Electronics Co Ltd | Atsudenshindoshino seizohoho |
| JPS53131792A (en) * | 1977-04-22 | 1978-11-16 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
| JPS5561124A (en) * | 1978-10-31 | 1980-05-08 | Seiko Instr & Electronics Ltd | Composite vibrator |
| JPS562451A (en) * | 1979-06-20 | 1981-01-12 | Nippon Carbureter Co Ltd | Carburetor using air valve |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316408A (en) * | 1989-06-14 | 1991-01-24 | Murata Mfg Co Ltd | Resonance frequency adjustment method for piezoelectric tuning fork vibration |
| JP2007096899A (en) * | 2005-09-29 | 2007-04-12 | Seiko Epson Corp | Manufacturing method and bonding structure of piezoelectric vibration piece, and piezoelectric device |
| JP2007243435A (en) * | 2006-03-07 | 2007-09-20 | Daishinku Corp | Piezoelectric resonator chip and frequency adjustment method for same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2678901B2 (en) | 1997-11-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |