JPS63119537U - - Google Patents
Info
- Publication number
- JPS63119537U JPS63119537U JP1031187U JP1031187U JPS63119537U JP S63119537 U JPS63119537 U JP S63119537U JP 1031187 U JP1031187 U JP 1031187U JP 1031187 U JP1031187 U JP 1031187U JP S63119537 U JPS63119537 U JP S63119537U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- handler
- section
- disc
- discs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1031187U JPH0720102Y2 (ja) | 1987-01-26 | 1987-01-26 | 円板移し替え装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1031187U JPH0720102Y2 (ja) | 1987-01-26 | 1987-01-26 | 円板移し替え装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63119537U true JPS63119537U (de) | 1988-08-02 |
JPH0720102Y2 JPH0720102Y2 (ja) | 1995-05-10 |
Family
ID=30796485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1031187U Expired - Lifetime JPH0720102Y2 (ja) | 1987-01-26 | 1987-01-26 | 円板移し替え装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720102Y2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001237306A (ja) * | 2000-02-25 | 2001-08-31 | Nikon Corp | 基板ハンド、搬送装置、検査装置および平面基板収納装置 |
WO2015033439A1 (ja) * | 2013-09-06 | 2015-03-12 | 株式会社島津製作所 | 基板装着姿勢判定装置及び基板装着姿勢判定方法 |
-
1987
- 1987-01-26 JP JP1031187U patent/JPH0720102Y2/ja not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001237306A (ja) * | 2000-02-25 | 2001-08-31 | Nikon Corp | 基板ハンド、搬送装置、検査装置および平面基板収納装置 |
JP4538883B2 (ja) * | 2000-02-25 | 2010-09-08 | 株式会社ニコン | 平面基板観察装置 |
WO2015033439A1 (ja) * | 2013-09-06 | 2015-03-12 | 株式会社島津製作所 | 基板装着姿勢判定装置及び基板装着姿勢判定方法 |
JP5999268B2 (ja) * | 2013-09-06 | 2016-09-28 | 株式会社島津製作所 | 基板装着姿勢判定装置及び基板装着姿勢判定方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0720102Y2 (ja) | 1995-05-10 |