JPS63119243U - - Google Patents
Info
- Publication number
- JPS63119243U JPS63119243U JP998387U JP998387U JPS63119243U JP S63119243 U JPS63119243 U JP S63119243U JP 998387 U JP998387 U JP 998387U JP 998387 U JP998387 U JP 998387U JP S63119243 U JPS63119243 U JP S63119243U
- Authority
- JP
- Japan
- Prior art keywords
- light
- substrate
- processing apparatus
- ultraviolet
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000007246 mechanism Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP998387U JPH0325407Y2 (zh) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP998387U JPH0325407Y2 (zh) | 1987-01-28 | 1987-01-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119243U true JPS63119243U (zh) | 1988-08-02 |
| JPH0325407Y2 JPH0325407Y2 (zh) | 1991-06-03 |
Family
ID=30795818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP998387U Expired JPH0325407Y2 (zh) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325407Y2 (zh) |
-
1987
- 1987-01-28 JP JP998387U patent/JPH0325407Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325407Y2 (zh) | 1991-06-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2020057790A5 (zh) | ||
| ES526181A0 (es) | Un material de transferencia fotosensible | |
| JPS63119243U (zh) | ||
| JPS63119242U (zh) | ||
| JPH0241437U (zh) | ||
| JPS62194739U (zh) | ||
| JPH0666250B2 (ja) | プロキシミテイ露光用マスク装置 | |
| JPS55128817A (en) | Device for bonding piece on tape | |
| JPS62264118A (ja) | 無接触ワ−ク空気保持装置 | |
| JPS6464334A (en) | Apparatus for mounting semiconductor wafer | |
| JPS6478282A (en) | Partially temporary adhesion material for cover and manufacture thereof | |
| JPS62196346U (zh) | ||
| JPH0265342U (zh) | ||
| JPS61144640U (zh) | ||
| JPS6311731Y2 (zh) | ||
| JPS63159836U (zh) | ||
| JPS6464772A (en) | Tacky sheet for polishing | |
| JPH0291340U (zh) | ||
| JPH0270427U (zh) | ||
| JPH0366928U (zh) | ||
| JPS6329132U (zh) | ||
| JPS62194741U (zh) | ||
| JPS6283949A (ja) | ウエハ搬送装置 | |
| JPS6385093U (zh) | ||
| JPH0286132U (zh) |