JPS6311727Y2 - - Google Patents
Info
- Publication number
- JPS6311727Y2 JPS6311727Y2 JP1983000921U JP92183U JPS6311727Y2 JP S6311727 Y2 JPS6311727 Y2 JP S6311727Y2 JP 1983000921 U JP1983000921 U JP 1983000921U JP 92183 U JP92183 U JP 92183U JP S6311727 Y2 JPS6311727 Y2 JP S6311727Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor board
- jig
- semiconductor
- opening
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 35
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP92183U JPS59107141U (ja) | 1983-01-08 | 1983-01-08 | 半導体板の取扱い治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP92183U JPS59107141U (ja) | 1983-01-08 | 1983-01-08 | 半導体板の取扱い治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59107141U JPS59107141U (ja) | 1984-07-19 |
| JPS6311727Y2 true JPS6311727Y2 (US20020051482A1-20020502-M00012.png) | 1988-04-05 |
Family
ID=30132656
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP92183U Granted JPS59107141U (ja) | 1983-01-08 | 1983-01-08 | 半導体板の取扱い治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59107141U (US20020051482A1-20020502-M00012.png) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554543B2 (US20020051482A1-20020502-M00012.png) * | 1974-10-25 | 1980-01-30 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554543U (US20020051482A1-20020502-M00012.png) * | 1978-06-22 | 1980-01-12 |
-
1983
- 1983-01-08 JP JP92183U patent/JPS59107141U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554543B2 (US20020051482A1-20020502-M00012.png) * | 1974-10-25 | 1980-01-30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59107141U (ja) | 1984-07-19 |
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