JPS6311672Y2 - - Google Patents
Info
- Publication number
- JPS6311672Y2 JPS6311672Y2 JP1980184445U JP18444580U JPS6311672Y2 JP S6311672 Y2 JPS6311672 Y2 JP S6311672Y2 JP 1980184445 U JP1980184445 U JP 1980184445U JP 18444580 U JP18444580 U JP 18444580U JP S6311672 Y2 JPS6311672 Y2 JP S6311672Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic field
- effect element
- substrate
- hall effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 99
- 230000005355 Hall effect Effects 0.000 claims description 30
- 239000010408 film Substances 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 12
- 230000035945 sensitivity Effects 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 230000005294 ferromagnetic effect Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 30
- 238000000034 method Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 5
- 238000001259 photo etching Methods 0.000 description 5
- 239000003302 ferromagnetic material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000005520 electrodynamics Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910000531 Co alloy Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980184445U JPS6311672Y2 (zh) | 1980-12-22 | 1980-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980184445U JPS6311672Y2 (zh) | 1980-12-22 | 1980-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57105977U JPS57105977U (zh) | 1982-06-30 |
| JPS6311672Y2 true JPS6311672Y2 (zh) | 1988-04-05 |
Family
ID=29984606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980184445U Expired JPS6311672Y2 (zh) | 1980-12-22 | 1980-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311672Y2 (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4613661B2 (ja) * | 2005-03-29 | 2011-01-19 | ヤマハ株式会社 | ３軸磁気センサの製法 |
| US7768083B2 (en) * | 2006-01-20 | 2010-08-03 | Allegro Microsystems, Inc. | Arrangements for an integrated sensor |
| JP2007303864A (ja) * | 2006-05-09 | 2007-11-22 | Matsushita Electric Ind Co Ltd | 磁界センサおよび磁界センシングの方法 |
| US7564237B2 (en) * | 2007-10-23 | 2009-07-21 | Honeywell International Inc. | Integrated 3-axis field sensor and fabrication methods |
-
1980
- 1980-12-22 JP JP1980184445U patent/JPS6311672Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57105977U (zh) | 1982-06-30 |
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