JPS6311605B2 - - Google Patents
Info
- Publication number
- JPS6311605B2 JPS6311605B2 JP56174233A JP17423381A JPS6311605B2 JP S6311605 B2 JPS6311605 B2 JP S6311605B2 JP 56174233 A JP56174233 A JP 56174233A JP 17423381 A JP17423381 A JP 17423381A JP S6311605 B2 JPS6311605 B2 JP S6311605B2
- Authority
- JP
- Japan
- Prior art keywords
- reflective
- reflective film
- base material
- scale
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 35
- 238000006073 displacement reaction Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 19
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 239000010931 gold Substances 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 9
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 claims description 8
- 229910000423 chromium oxide Inorganic materials 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 239000000615 nonconductor Substances 0.000 claims description 4
- 239000010408 film Substances 0.000 description 58
- 239000000758 substrate Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 4
- 238000001579 optical reflectometry Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Electroplating Methods And Accessories (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17423381A JPS5875004A (ja) | 1981-10-30 | 1981-10-30 | 光電式変位検出装置の反射型スケ−ルの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17423381A JPS5875004A (ja) | 1981-10-30 | 1981-10-30 | 光電式変位検出装置の反射型スケ−ルの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5875004A JPS5875004A (ja) | 1983-05-06 |
| JPS6311605B2 true JPS6311605B2 (es) | 1988-03-15 |
Family
ID=15975043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17423381A Granted JPS5875004A (ja) | 1981-10-30 | 1981-10-30 | 光電式変位検出装置の反射型スケ−ルの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5875004A (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2597431A1 (en) | 2011-11-22 | 2013-05-29 | Mitutoyo Corporation | Scale of photoelectric encoder and manufacturing method of the same |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61197510U (es) * | 1985-05-31 | 1986-12-10 | ||
| GB8616240D0 (en) * | 1986-07-03 | 1986-08-13 | Renishaw Plc | Opto-electronic scale reading apparatus |
| DE4303975A1 (de) * | 1993-02-11 | 1994-08-18 | Heidenhain Gmbh Dr Johannes | Teilungsträger |
| DE10011872A1 (de) * | 2000-03-10 | 2001-09-27 | Heidenhain Gmbh Dr Johannes | Reflexions-Messteilung und Verfahren zur Herstellung derselben |
| JP5239303B2 (ja) * | 2007-11-14 | 2013-07-17 | 株式会社ニコン | 磁気回転体の製造方法およびエンコーダ装置 |
| JP5577975B2 (ja) * | 2010-09-15 | 2014-08-27 | 株式会社ニコン | 光学式エンコーダ用反射板、エンコーダ及び光学式エンコーダ用反射板の製造方法 |
| JP6425875B2 (ja) * | 2013-06-14 | 2018-11-21 | 株式会社ミツトヨ | 光電式測定器用スケール、エンコーダ及びスケールの形成方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55152410U (es) * | 1980-04-09 | 1980-11-04 |
-
1981
- 1981-10-30 JP JP17423381A patent/JPS5875004A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2597431A1 (en) | 2011-11-22 | 2013-05-29 | Mitutoyo Corporation | Scale of photoelectric encoder and manufacturing method of the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5875004A (ja) | 1983-05-06 |
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