JPS63115236U - - Google Patents
Info
- Publication number
- JPS63115236U JPS63115236U JP1987007884U JP788487U JPS63115236U JP S63115236 U JPS63115236 U JP S63115236U JP 1987007884 U JP1987007884 U JP 1987007884U JP 788487 U JP788487 U JP 788487U JP S63115236 U JPS63115236 U JP S63115236U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- laser trimming
- illumination light
- pattern
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 4
- 238000009966 trimming Methods 0.000 claims 3
- 230000001154 acute effect Effects 0.000 claims 1
- 238000003909 pattern recognition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Image Input (AREA)
- Adjustable Resistors (AREA)
Description
第１図は本考案の一実施例を示すブロツク図で
ある。
主要部分の符号の説明、１……レーザ発振器、
５……Ｙ軸ガルバノメータ、６……Ｘ軸ガルバノ
メータ、９……被加工サンプル、１０……結像光
学系、１１……テレビカメラ、１２，１３……照
明用光源、θ……被加工サンプルと照明光とのな
す角度。
FIG. 1 is a block diagram showing one embodiment of the present invention. Explanation of symbols of main parts, 1... Laser oscillator,
5...Y-axis galvanometer, 6...X-axis galvanometer, 9... Sample to be processed, 10... Imaging optical system, 11... Television camera, 12, 13... Light source for illumination, θ... Sample to be processed The angle between the light and the illumination light.
Claims (1)
ターン認識を行うパターン認識装置を有するレー
ザトリミング装置であつて、前記被加工物上に高
指向性の照明光を上方より照射する複数の光源を
設け、前記被加工物と前記照明光とのなす角度が
夫々鋭角となるようにしたことを特徴とするレー
ザトリミング装置。 A laser trimming device includes a pattern recognition device that recognizes a pattern of the workpiece using reflected light from the workpiece, the laser trimming device comprising a plurality of light sources that irradiate highly directional illumination light onto the workpiece from above. A laser trimming apparatus characterized in that the angles formed between the workpiece and the illumination light are acute angles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007884U JPS63115236U (en) | 1987-01-22 | 1987-01-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987007884U JPS63115236U (en) | 1987-01-22 | 1987-01-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115236U true JPS63115236U (en) | 1988-07-25 |
Family
ID=30791752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987007884U Pending JPS63115236U (en) | 1987-01-22 | 1987-01-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115236U (en) |
-
1987
- 1987-01-22 JP JP1987007884U patent/JPS63115236U/ja active Pending