JPS63138991U

JPS63138991U -

Info

Publication number: JPS63138991U
Application number: JP1987032488U
Authority: JP
Priority date: 1987-03-05
Filing date: 1987-03-05
Publication date: 1988-09-13

Description

[Brief explanation of drawings]

第１図は本考案の一実施例を示す縦断面図、第
２図ａは第１図のエキシマレーザ発振器から出射
されたレーザビームの断面図、第２図ｂは第１図
の試料上に照射されたレーザビームの断面図、第
３図ａは第２図ａの矩形ビームの短辺方向のレー
ザ光強度分布を示す図、第３図ｂは第２図ａの矩
形ビームの長辺方向のレーザ光強度分布を示す図
、第４図は第１図の円筒状ｆθレンズの斜視図、
第５図ａは本考案の他の実施例の構成を示す平面
図、第５図ｂは第５図ａのＤ―Ｄ方向の断面図、
第６図ａは第５図のエキシマレーザ発振器から出
射されたレーザビームの断面図、第６図ｂは第５
図の試料上に照射されたレーザビームの断面図で
ある。主要部分の符号の説明、１……エキシマレーザ
発振器、２……スキヤンニングミラー、３……円
筒状ｆθレンズ、６……シリンドリカルレンズ。 FIG. 1 is a longitudinal cross-sectional view showing an embodiment of the present invention, FIG. 2 a is a cross-sectional view of the laser beam emitted from the excimer laser oscillator of FIG. 1, and FIG. A cross-sectional view of the irradiated laser beam, FIG. 3a is a diagram showing the laser light intensity distribution in the short side direction of the rectangular beam in FIG. 2a, and FIG. 3b is a diagram showing the long side direction of the rectangular beam in FIG. 2a. Figure 4 is a perspective view of the cylindrical fθ lens in Figure 1,
FIG. 5a is a plan view showing the configuration of another embodiment of the present invention, FIG. 5b is a sectional view taken along the line DD in FIG. 5a,
FIG. 6a is a cross-sectional view of the laser beam emitted from the excimer laser oscillator in FIG.
FIG. 3 is a cross-sectional view of a laser beam irradiated onto the sample shown in the figure. Explanation of symbols of main parts: 1... Excimer laser oscillator, 2... Scanning mirror, 3... Cylindrical fθ lens, 6... Cylindrical lens.

Claims

[Claims for Utility Model Registration] (1) An excimer laser processing device that performs laser processing using excimer laser light, comprising a scanning means for scanning the excimer laser light on a workpiece;
A cylindrical fθ lens that focuses the excimer laser light that has passed through the scanning means onto the workpiece is provided so as to be perpendicular to the optical axis of the excimer laser light, and the scanning means and the cylindrical fθ lens An excimer laser processing apparatus characterized in that the excimer laser beam scans the workpiece using the excimer laser beam. (2) The scanning means includes a rotatable reflecting mirror and a cylindrical lens, and the excimer laser beam scans the workpiece by rotating the reflecting mirror. An excimer laser processing device according to claim 1 of the utility model registration claim.