JPS63113363A - Contactor for microelectronics multipolar element - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed description of the invention [Industrial field of application] The present invention relates to a microelectronic multipole device in the form of a so-called stylus card with a number of stylus corresponding to the number of contacts of the element to be tested. The present invention relates to a contact device for testing devices, especially high-density integrated circuits.

BACKGROUND OF THE INVENTION Modern components of microelectronics, such as high-density integrated circuits, e.g.
(such as earth capacitance, electromagnetic coupling and contact ohmic resistance, etc.)
must be contacted in the test equipment so that as little as possible occurs. Only then can the electrical characteristics of the device be accurately measured. However, complete measurements of sub-nanosecond integrated circuits and sub-nanosecond chips are difficult or impossible to perform using conventional contact devices for the following reasons. Highly integrated devices have increasingly finer contact pitches. Conventionally, therefore, contact by individual springs with conventional shapes and dimensions has structural limitations and generates electrical disturbances.The use of flexible printed wiring boards in combination with elastic pressure cushions Contact by contacting does not necessarily result in a -like contact force on all contact points, but this method of contact faces difficulties for other reasons as well. When the number of contacts of the device to be tested is such that they can no longer all be arranged in a row on the edge of the device, the flexibility of contacting bonding pads arranged one after the other in several rows of the device Conventionally, it has been impossible to use printed wiring boards. Therefore, chip contact on silicon plates is still currently carried out using stylus probes.

For the construction of such a contact device with stylus arranged in a so-called stylus card in a number corresponding to the number of contacts of the element to be tested, a series of solutions are known, e.g. It is known to use a stylus that cantilevers downward and away from the edge of the inner opening of a card with stylus, and each of these stylus has a cantilever that is bent downward and deflected downward. The manufacturing of such a contact device, which presses the respective bonding pad on the edge of the device, requires a small spacing of the bonding pads of the device and therefore a small spacing of the bonding pads of the contact device for the testing of highly multipole devices. Extremely difficult due to extremely small dimensions.

It has therefore already been proposed to introduce the end of the stylus used for contact into a guide hole in a plate arranged above the element to be tested. The stylus projects slightly bent upwards from this plate, and its end is embedded in a common block. Due to the slight bending of the stylus, the stylus deflects slightly laterally when pressed onto each element to be tested, thus allowing a spring-elastic pressing. A disadvantage of such a device is that the stylus deviates upwards perpendicularly to the stylus card rather than in the direction of the stylus card and therefore generates a large amount of electrical disturbance due to its length and position. Furthermore, replacing the needle in case of damage to the needle is almost impossible with this contact device.

It has already been proposed to guide the individual stylus needles in tubules that are all embedded together in a so-called contact block, thereby ensuring their spacing. A disadvantage of this contact device is that the cross-section of the needle must be made very small when the contact spacing of the element to be tested is very small. This is because the stylus must be guided through the guide tube. Furthermore, the formation of contact between the stylus and the guide tube is uncertain. Since all guide tubes are cast into the contact block, replacement of individual needles is possible, but replacement of damaged guide tubes is not possible.

[Problems to be Solved by the Invention] The present invention does not generate large amounts of electrical disturbance compared to known contact devices, can be manufactured fully mechanized with high precision,
It is an object of the present invention to provide a contact device of the above type, in which individual stylus or groups of stylus can be replaced at any time.

[Means for solving the problem] This object is based on the invention, in which the stylus is formed in a U-shape, and one of the two legs of each stylus passes through a narrow tolerance guide hole in the stylus card. protrude vertically downward,
Its tip is placed to press against the bonding pad of the device to be tested, each other leg of the stylus is connected to a conductor path to the test equipment, and the part connecting the two legs of the stylus is formed straight to touch the This is achieved by narrow spacing relative to the stapled cards.

Embodiments of the invention are described in the following claims.

[Examples] Next, the present invention will be described in detail with reference to drawings showing a plurality of embodiments of the contact device based on the present invention.

FIG. 1 is a side view, partially in section, of a contact device according to the invention comprising a card l with a stylus, a stylus 2 and a base 10 mounted on the upper surface of the card l with a stylus. As shown in FIG. 1, the stylus 2 is formed in a U-shape, with one of the legs of the stylus 2, namely leg 3, passing vertically downward through a narrow tolerance guide hole 4 in the stylus card l. It is arranged such that its tip protrudes toward the surface and presses the top of the bonding pad 5 of the element 6 to be tested with its spring elasticity.

The other leg 7 of the stylus 2 is connected to a conductor path 8 to the test device. In the embodiment of FIG. 1, the leg 7 is soldered to a through-hole contact hole 15 of the stylus card 1. However, as shown in FIG. 2, it is also possible to bend the leg 7 of the stylus 2 and connect it directly to a conductor path 8 to the test device.

Furthermore, as shown in FIG. 1, the part 9 connecting the legs 3 and 7 of the stylus 2 is of straight construction and is arranged, for example, parallel to the stylus card l at a narrow distance. This means that all parts of the stylus 2 are short and close to the stylus card l, and that the conductor path 8 from the stylus 2 to the test device can be located approximately in the plane of the stylus card 1. It has the great advantage of

As shown in FIG. 1 and especially FIG.

In the illustrated embodiment, the portion 9 that connects both legs of all the stylus 2 is attached to a pedestal 10 provided on the top surface of the card 1 with the stylus.
is supported within. It is particularly advantageous to construct this base 10 in two parts, in which case at least the lower part 11
is provided with a notch 12 in which the part 9 connecting the legs of the stylus is held firmly. A particularly secure retention of this part of the stylus 2 is ensured by the notch 14 in the upper part 1 of the seat.
This is achieved when 3 is also provided.

By arranging, for example, a stand 16 below the stylus 2, an initial stress can be applied to the stylus 2 supported within the pedestal 10.

By supporting the stylus 2 in the pedestal 10 constructed in this way, if an individual stylus or a group of stylus become damaged, these stylus can be removed by lifting off the upper part 13 of the pedestal 10. It is possible to remove the needle and replace it with a new stylus.

Furthermore, the construction and arrangement of the individual parts of the contact device according to the invention allows all parts to be fully mechanized with high precision so that the stylus can be simply inserted into the notch 12 or 14 of the pedestal 10. It can be adjusted easily, quickly and with high precision. Furthermore, the contact device according to the invention is very economical since it consumes significantly less time during manufacture and repair.

FIG. 4 shows a device similar to FIG.
As can be seen from FIG. 5, which shows a cross section according to FIG.

[Brief explanation of the drawing]

FIG. 1 is a partially cross-sectional side view of an embodiment of the contact device according to the present invention, FIG. 2 is a side view of another main part on the actual flow side, and FIG. 3 is the contact device shown in FIG. 1. FIG. 4 is a partial view of yet another embodiment, and FIG. 5 is a cross-sectional view of the contact device shown in FIG. 4, taken along section line IV--IV. 1...Card with stylus, 211...Stylus, 3.7
・Kenmeikyaku, 5...Bonding pad, 6
...Element, 8 fist φ/conductor path, 9...part connecting both legs, 10/fist/pedestal, 11...φ lower part,
12.14@・Fist notch, 13...Top.

Claims (1)

Claims: 1) A contact device for testing multipole microelectronic elements in the form of a so-called stylus card with a number of stylus corresponding to the number of contacts of the element to be tested, comprising: The stylus (2) is formed in a U-shape, with one of the legs (3) of each stylus (2) passing vertically through a narrow tolerance guide hole (4) in the stylus card (1). It projects downwards and is arranged so that its tip presses on the bonding pad (5) of the element to be tested (6), and the respective other leg (7) of the stylus (2) connects the conductor path to the test device. (8), and the part (9) connecting both legs of the stylus (2) is formed straight and arranged at a narrow interval with respect to the stylus-attached card (1). Contact device for testing electronic multipolar elements. 2) The part (9) connecting both legs of the stylus (2) is supported in a pedestal (10) attached to the top surface of the card with stylus (1). Range 1
Apparatus described in section. 3) The base (10) has a lower part (11) firmly placed on the stylus card (1) and provided with an indentation (12) and an indentation (11) which serves as a cover and is preferably similarly arranged.
4) at least one upper part (13). 4) The device according to any one of claims 1 to 3, characterized in that the guide hole is configured as a round hole. 5) The device according to any one of claims 1 to 3, wherein the guide hole is configured as a long hole.