JPS63112442A - Panel cleaning method for color picture tube - Google Patents
Panel cleaning method for color picture tubeInfo
- Publication number
- JPS63112442A JPS63112442A JP25916586A JP25916586A JPS63112442A JP S63112442 A JPS63112442 A JP S63112442A JP 25916586 A JP25916586 A JP 25916586A JP 25916586 A JP25916586 A JP 25916586A JP S63112442 A JPS63112442 A JP S63112442A
- Authority
- JP
- Japan
- Prior art keywords
- panel
- water
- cleaning
- washed
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000004140 cleaning Methods 0.000 title claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000005406 washing Methods 0.000 claims abstract description 20
- 239000007779 soft material Substances 0.000 claims abstract description 3
- 238000005554 pickling Methods 0.000 claims description 13
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 abstract description 13
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 8
- 239000002253 acid Substances 0.000 abstract description 3
- 239000004677 Nylon Substances 0.000 abstract description 2
- 229920001778 nylon Polymers 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 230000001680 brushing effect Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、カラー受像管用パネルの洗浄方法に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a method for cleaning a color picture tube panel.
(従来の技術)
近年、カラー受像管の画面はますます微細化しており、
中・高精細ディスプレイ管に代表されるように画面は最
も細かいもので500万個以上(14インチ0.20u
mビッヂ円形孔マスクタイプ)の絵素から構成されてい
る。(Conventional technology) In recent years, the screens of color picture tubes have become increasingly finer.
As represented by medium- and high-definition display tubes, the smallest screen has more than 5 million pieces (14 inch 0.20u
It is composed of picture elements (m-bit circular hole mask type).
従ってこの無数に近い絵素に相当する蛍光面形成作業に
おいては欠点のないスクリーンを得るために種々の困難
が伴う。Therefore, in the work of forming a phosphor screen corresponding to an almost infinite number of picture elements, various difficulties are encountered in order to obtain a screen without defects.
従来のブラックマトリックスタイプ蛍光面やブラッ久ス
1.ドライブタイプ蛍光面等の蛍光面形成工程は第2図
に示すように、高温環境下例えば450℃の炉内で処理
されたパネルをまず水洗工程10で約15秒間の洗浄を
行い、その直後酸洗工程11でフッ酸(HF濃度10〜
18%)や硝酸(HNO3濃度5〜10%)またはこれ
ら混合物等からなる洗浄液により30秒〜1分間酸洗浄
した後、再び水洗工程12で約30−1分間水洗いを行
う、そしてレジスト塗布工程13でレジストを塗布した
後、乾燥工程14を経て次工程の露光焼付工程へと送る
。Conventional black matrix type fluorescent screen and black matrix 1. In the process of forming a phosphor screen such as a drive-type phosphor screen, as shown in Figure 2, a panel that has been processed in a high-temperature environment, for example, in a furnace at 450°C, is first washed with water for about 15 seconds in step 10, and then immediately washed with acid. In washing step 11, hydrofluoric acid (HF concentration 10~
18%), nitric acid (HNO3 concentration 5 to 10%), or a mixture thereof for 30 seconds to 1 minute, and then water washing is performed again for about 30-1 minutes in water washing step 12, and then resist coating step 13 After the resist is applied in step 1, the film is sent to the next step, an exposure and baking step, through a drying step 14.
(発明が解決しようとする問題点)
ところが従来の製造方法では、パネルとマスりを組合わ
せて熱的に安定すべく約450°Cの炉の中を通す際に
、マスクに付着している塵埃やパネルの内壁に付着して
いる塵埃、さらに炉内の鉄粉等の重金属、油かす、塩ビ
屑等のゴミ類が高熱によりパネル内面に強固に付着し、
これら付着物が水洗工程で完全に除去されないため、こ
の付着物が酸洗処理中にエツチングむらを発生させると
いう問題があった。(Problem to be solved by the invention) However, in the conventional manufacturing method, when the panel and the mask are combined and passed through a furnace at about 450°C to be thermally stabilized, some particles adhere to the mask. Dust and dust adhering to the inner wall of the panel, as well as heavy metals such as iron powder in the furnace, oil scum, PVC debris, etc., firmly adhere to the inner surface of the panel due to the high heat.
Since these deposits are not completely removed during the water washing process, there is a problem in that the deposits cause uneven etching during the pickling process.
例えば、第3図(a)に示すようにパネル1面に塵埃2
が強固に付着したままの状態で酸洗工程でエツチング処
理を行うと、第3図(b)に示すようにゴミの付着して
いる部分がゴミのない部分即ち正常な部分に対しフッ酸
に依るエツチングの進行が遅くなるために塵埃付着部が
凸部3となって残存しパネル1内面の平滑が損なわれて
しまう。For example, as shown in Fig. 3(a), there is dust on one side of the panel.
If the etching process is performed in the pickling process while the dust is still firmly attached, the area to which the dust has adhered will be exposed to hydrofluoric acid compared to the area without dust, that is, the normal area, as shown in Figure 3(b). Since the etching progresses slowly, the dust-attached portion remains as a convex portion 3, and the smoothness of the inner surface of the panel 1 is impaired.
従って洗浄後に0.5μmあるいはそれ以下のレジスト
膜形成の際に塗布が一様にできず最終的にはレジスト膜
に微細な欠陥が発生してしまう。Therefore, when a resist film of 0.5 μm or less is formed after cleaning, the coating cannot be uniformly applied, and eventually minute defects occur in the resist film.
このレジスト膜欠陥を生じさせる塵埃の大きさを調べた
ところ約20μm以上のものがほとんどであった。When the size of the dust that causes this resist film defect was investigated, it was found that most of the particles were about 20 μm or larger.
一例として、14インチ0.31mmピッチのブラック
マトリックス蛍光面ではパネル1枚当りの欠点数は2〜
3個発生した。通常この欠点は検査工程の修正者に依り
修理を行うがこのような欠点は微細であるため検査作業
には困難を伴う。As an example, in a 14-inch 0.31mm pitch black matrix phosphor screen, the number of defects per panel is 2 to 2.
Three occurred. Normally, this defect is repaired by a person who corrects the inspection process, but since such a defect is minute, inspection work is difficult.
上記工程において水洗−酸洗一水洗一酸洗一水洗を繰返
し行うことによりパネル内面の付着物を完全に除去する
試みがなされているが完全な解決には至っていなかった
。Attempts have been made to completely remove deposits on the inner surface of the panel by repeating water washing, pickling, one pickling, and one water washing in the above steps, but no complete solution has been reached.
また、酸洗工程の後ブラッシングをして、ごみの除去を
することが行なわれていたが、酸洗後であるためごみの
あった部分が酸洗されずに凸状に残り、パネル表面の平
坦度の向上ははかれなかった。In addition, after the pickling process, brushing was performed to remove dust, but since the pickling process was completed, the areas where the dust was present were not pickled and remained in a convex shape, which caused the panel surface to deteriorate. No improvement in flatness was achieved.
本発明は上述した問題点を解決するためになされ、パネ
ル内面に付着した塵埃を完全に除去し、パネル平面の平
坦度が良好になるカラー受像管用パネル洗浄方法を提供
することを目的とする。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a method for cleaning a color picture tube panel, which completely removes dust adhering to the inner surface of the panel and improves the flatness of the panel plane.
[発明の構成コ
(問題点を解決するための手段)
本発明のカラー受像管用パネル洗浄方法は、蛍光面が形
成されていないパネルとシャドウマスクを組合せて高温
環境下で加熱処理を行う加熱処理工程と、加熱処理した
パネルの内面を洗浄液を供給しながら軟質素材によりブ
ラッシングしてパネル内面の付着物をパネルに損傷を与
えないように除去する洗浄工程と、ブラッシングしたパ
ネルを水洗する第1の水洗工程と、水洗したパネルを酸
洗処理する酸洗工程と、酸洗処理したパネルを水洗する
第2の水洗工程とを有することを特徴とする。[Structure of the Invention (Means for Solving Problems)] The color picture tube panel cleaning method of the present invention includes a heat treatment process in which a panel on which no phosphor screen is formed and a shadow mask are combined and heat treated in a high temperature environment. a cleaning process in which the inner surface of the heat-treated panel is brushed with a soft material while supplying a cleaning solution to remove deposits on the inner surface of the panel without damaging the panel; and a first step in which the brushed panel is washed with water. It is characterized by having a water washing step, a pickling step of carrying out a pickling treatment on the washed panel, and a second washing step of washing the pickled panel with water.
(作 用)
本発明は、物理的な洗浄処理を行うことでパネル内面に
付着した金属酸化物粉やその他の塵埃を完全に除去する
ことができる。(Function) The present invention can completely remove metal oxide powder and other dust adhering to the inner surface of the panel by performing a physical cleaning process.
(実施例)
以下、本発明方法の一実施例について第1図を参照にし
ながら説明する。(Example) An example of the method of the present invention will be described below with reference to FIG.
本例のカラー受像管用パネル洗浄法は大別して物理的洗
浄法と化学的洗浄法とからなり、ブラックマトリックス
またはブラックストライプ形成工程に選ばれたパネルを
まず物理的洗浄方法として洗剤ブラッシング工程20で
ナイロンブラシやガーゼでL−92(商品名プロロニッ
ク界面活性剤の0.2%溶液)を用いて約10〜15秒
間物理的にブラッシングし、次に水洗工程21にて約1
5秒の水洗を行いしかる後酸洗工程22においてフッ酸
(10〜18%)溶液で約15〜30秒間1〜1.5k
g/cj圧のスプレィ噴霧をする。The color picture tube panel cleaning method of this example is roughly divided into a physical cleaning method and a chemical cleaning method.The panel selected for the black matrix or black stripe forming process is first physically cleaned by a detergent brushing process 20 to remove nylon. Physically brush with L-92 (trade name: 0.2% solution of Proronic surfactant) for about 10 to 15 seconds with a brush or gauze, then wash with water for about 1 hour in step 21.
After washing with water for 5 seconds, in the pickling step 22, it is washed with a hydrofluoric acid (10-18%) solution for about 15-30 seconds at 1-1.5K.
Spray at g/cj pressure.
そして最終純水洗浄工程23で5y/ci7圧の高圧水
洗を行なった後、レジスト塗布工程24でレジストの塗
布を行い、乾燥工程25を経て次工程の露光焼付工程へ
と送る。このようなカラー受像管用パネル洗浄方法によ
り実際にパネルの処理をしたところ、パネル1枚当りの
欠点数(14インチ0.3i nピッチ)は0となった
。さらにこの種のパネルを100枚洗浄したところ80
枚以上の無修正のパネルを得ることができた。After performing high-pressure water washing at 5y/ci7 pressure in a final pure water washing step 23, a resist is applied in a resist coating step 24, followed by a drying step 25 and then sent to the next exposure and baking step. When a panel was actually treated using this color picture tube panel cleaning method, the number of defects per panel (14 inch 0.3 inch pitch) was zero. Furthermore, when 100 panels of this type were cleaned, 80%
I was able to get more than one uncensored panel.
[発明の効果コ
以上説明したように本発明のカラー受像管用パネル洗浄
方法によれば、パネル内面に付着した塵埃を完全に除去
することができるのでパネル内面が平滑になり、無修正
のパネルを得ることができる。[Effects of the Invention] As explained above, according to the color picture tube panel cleaning method of the present invention, dust adhering to the inner surface of the panel can be completely removed, so that the inner surface of the panel becomes smooth and an unmodified panel can be cleaned. Obtainable.
第1図は本発明方法の一実施例を示す図、第2図は従来
方法を示す図、第3図は従来方法における酸洗工程での
付着物の!5響を示す図である。
1・・・・・・・・・パネル
2・・・・・・・・・付着物
3・・・・・・・・・凸部
20・・・・・・・・・洗剤ブラッシング工程21・・
・・・・・・・水洗工程
22・・・・・・・・・酸洗工程
23・・・・・・・・・純水洗浄工程
24・・・・・・・・・レジスト塗布工程25・・・・
・・・・・乾燥工程
出願人 株式会社東芝
代理人 弁理士 須 山 佐 −
第1図Fig. 1 shows an embodiment of the method of the present invention, Fig. 2 shows a conventional method, and Fig. 3 shows deposits in the pickling process in the conventional method! It is a diagram showing the 5th Symphony. 1... Panel 2... Deposit 3... Convex portion 20... Detergent brushing step 21.・
......Water washing step 22...Pickling step 23...Pure water washing step 24...Resist coating step 25・・・・・・
...Drying process applicant Toshiba Corporation agent Patent attorney Sasu Suyama - Figure 1
Claims (1)
クを組合せて高温環境下で加熱処理を行う加熱処理工程
と、前記加熱処理したパネルの内面を洗浄液を供給しな
がら軟質素材によりブラッシングしてパネル内面の付着
物をパネルに損傷を与えないように除去する洗浄工程と
、前記ブラッシングしたパネルを水洗する第1の水洗工
程と、前記水洗したパネルを酸洗処理する酸洗工程と、
前記酸洗処理したパネルを水洗する第2の水洗工程とを
有するカラー受像管用パネル洗浄方法。(1) A heat treatment process in which a panel on which no phosphor screen is formed and a shadow mask are combined and heat-treated in a high-temperature environment, and the inner surface of the heat-treated panel is brushed with a soft material while supplying a cleaning liquid. a cleaning step of removing deposits on the inner surface without damaging the panel; a first washing step of washing the brushed panel with water; and a pickling step of treating the washed panel with pickling;
A method for cleaning a color picture tube panel, comprising: a second washing step of washing the pickled panel with water.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61259165A JPH0818851B2 (en) | 1986-10-30 | 1986-10-30 | Color picture tube panel cleaning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61259165A JPH0818851B2 (en) | 1986-10-30 | 1986-10-30 | Color picture tube panel cleaning method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63112442A true JPS63112442A (en) | 1988-05-17 |
JPH0818851B2 JPH0818851B2 (en) | 1996-02-28 |
Family
ID=17330251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61259165A Expired - Lifetime JPH0818851B2 (en) | 1986-10-30 | 1986-10-30 | Color picture tube panel cleaning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0818851B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58115044A (en) * | 1981-12-28 | 1983-07-08 | Watanabe Shoko:Kk | Cleaning of glass |
-
1986
- 1986-10-30 JP JP61259165A patent/JPH0818851B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58115044A (en) * | 1981-12-28 | 1983-07-08 | Watanabe Shoko:Kk | Cleaning of glass |
Also Published As
Publication number | Publication date |
---|---|
JPH0818851B2 (en) | 1996-02-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |