JPH0818851B2 - Color picture tube panel cleaning method - Google Patents

Color picture tube panel cleaning method

Info

Publication number
JPH0818851B2
JPH0818851B2 JP61259165A JP25916586A JPH0818851B2 JP H0818851 B2 JPH0818851 B2 JP H0818851B2 JP 61259165 A JP61259165 A JP 61259165A JP 25916586 A JP25916586 A JP 25916586A JP H0818851 B2 JPH0818851 B2 JP H0818851B2
Authority
JP
Japan
Prior art keywords
panel
color picture
pickling
picture tube
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61259165A
Other languages
Japanese (ja)
Other versions
JPS63112442A (en
Inventor
裕 田中
房夫 坂田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP61259165A priority Critical patent/JPH0818851B2/en
Publication of JPS63112442A publication Critical patent/JPS63112442A/en
Publication of JPH0818851B2 publication Critical patent/JPH0818851B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Surface Treatment Of Glass (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、カラー受像管用パネルの洗浄方法に関す
る。
TECHNICAL FIELD The present invention relates to a method for cleaning a panel for a color picture tube.

(従来の技術) 近年、カラー受像管の画面はますます微細化してお
り、中・高精細ディスプレイ管に代表されるように画面
は最も細かいもので500万個以上(14インチ0.20mmピッ
チ円形孔マスクタイプ)の絵素から構成されている。
(Prior art) In recent years, the screens of color picture tubes have become finer and finer, and the finest screens are represented by medium- and high-definition display tubes. More than 5 million (14 inch 0.20mm pitch circular holes) Mask type) consists of picture elements.

従ってこの無数に近い絵素に相当する蛍光面形成作業
においては欠点のないスクリーンを得るために種々の困
難が伴う。
Therefore, in the work of forming a fluorescent screen corresponding to the innumerable picture elements, various difficulties are involved in obtaining a screen without defects.

従来のブラックマトリックスタイプの蛍光面やブラッ
クストライプタイプ蛍光面等の蛍光面形成工程は第2図
に示すように、高温環境下例えば450℃の炉内で処理さ
れたパネルをまず水洗工程10で約15秒間の洗浄を行い、
その直後酸洗工程11でフッ酸(HF濃度10〜18%)や硝酸
(HNO3濃度5〜10%)またはこれら混合物等からなる洗
浄液により30秒〜1分間酸洗浄した後、再び水洗工程12
で約30〜1分間水洗いを行う。そしてレジスト塗布工程
13でレジストを塗布した後、乾燥工程14を経て次工程の
露光焼付工程へと送る。
As shown in FIG. 2, the conventional process for forming a fluorescent screen such as a black matrix type fluorescent screen or a black stripe type fluorescent screen is as follows. Wash for 15 seconds,
Immediately after that, in the pickling step 11, hydrofluoric acid (HF concentration: 10 to 18%), nitric acid (HNO 3 concentration: 5 to 10%), or a mixture of these or the like is used for pickling for 30 seconds to 1 minute, and then again in the washing step 12
Wash with water for about 30 to 1 minute. And resist coating process
After applying the resist in 13, the film is sent to the exposure and printing process of the next process through the drying process 14.

(発明が解決しようとする問題点) ところが従来の製造方法では、パネルとマスクを組合
わせて熱的に安定すべく約450℃の炉の中を通す際に、
マスクに付着している塵挨やパネルの内壁に付着してい
る塵挨、さらに炉内の鉄粉等の重金属、油かす、塩ビ屑
等のゴミ類が高熱によりパネル内面に強固に付着し、こ
れら付着物が水洗工程で完全に除去されないため、この
付着物が酸洗処理中にエッチングむらを発生させるとい
う問題があった。
(Problems to be solved by the invention) However, in the conventional manufacturing method, when the panel and the mask are combined and passed through a furnace at about 450 ° C. to be thermally stable,
Dust adhering to the mask and dust adhering to the inner wall of the panel, as well as heavy metals such as iron powder in the furnace, oil residue, and dust such as vinyl chloride cling strongly to the inner surface of the panel due to high heat, Since these deposits are not completely removed in the water washing step, there is a problem that the deposits cause uneven etching during the pickling process.

例えば、第3図(a)に示すようにパネル1面に塵埃
2が強固に付着したままの状態で酸洗工程でエッチング
処理を行うと、第3図(b)に示すようにゴミの付着し
ている部分がゴミのない部分即ち正常な部分に対しフッ
酸に依るエッチングの進行が遅くなるために塵埃付着物
が凸部3となって残存しパネル1内面の平滑が損なわれ
てしまう。従って洗浄後に0.5μmあるいはそれ以下の
レジスト膜形成の際に塗布が一様にできず最終的にはレ
ジスト膜に微細な欠陥が発生してしまう。
For example, as shown in FIG. 3 (a), when the dust 2 is firmly adhered to the surface of the panel 1 and the etching process is performed in the pickling step, the dust adheres as shown in FIG. 3 (b). Since the progress of the etching due to the hydrofluoric acid is slower in the dust-free portion, that is, in the normal portion, the dust deposit remains as the convex portion 3 and the smoothness of the inner surface of the panel 1 is impaired. Therefore, when the resist film having a thickness of 0.5 μm or less is formed after the cleaning, the coating cannot be made uniform, and fine defects eventually occur in the resist film.

このレジスト膜欠陥を生じさせる塵埃の大きさを調べ
たとろ約20μm以上のものがほとんどであった。
When the size of dust that causes the resist film defect was examined, it was found that most of them were about 20 μm or more.

一例として、14インチ0.31mmピッチのブラックマトリ
ックス蛍光面ではパネル1枚当りの欠点数は2〜3個発
生した。通常この欠点は検査工程の修正者に依り修理を
行うがこのような欠点は微細であるため検査作業には困
難を伴う。
As an example, in the 14-inch 0.31 mm pitch black matrix phosphor screen, the number of defects per panel was 2-3. Usually, this defect is repaired by a person who corrects the inspection process, but since such a defect is minute, inspection work is difficult.

上記工程において水洗−酸洗−水洗−酸洗−水洗を繰
返し行うことによりパネル内面の付着物を完全に除去す
る試みがなされている完全な解決には至っていなかっ
た。
An attempt has been made to completely remove the deposits on the inner surface of the panel by repeating washing with water, pickling, washing with water, pickling and washing with water in the above steps, but this has not been completely solved.

また、酸洗工程の後ブラッシングをして、ごみの除去
をすることが行なわれていたが、酸洗後であるためごみ
のあった部分が酸洗されずに凸状に残り、パネル表面の
平坦度の向上ははかれなかった。
In addition, after the pickling process, brushing was performed to remove dust, but since it was after pickling, the part with dust remained in a convex shape without being pickled, and the surface of the panel The flatness was not improved.

本発明は上述した問題点を解決するためになされ、パ
ネル内面に付着した塵挨を完全に除去し、パネル平面の
平坦度が良好になるカラー受像管用パネル洗浄方法を提
供することを目的とする。
The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for cleaning a panel for a color picture tube, by which dust adhering to the inner surface of the panel is completely removed and the flatness of the panel plane is improved. .

[発明の構成] (問題点を解決するための手段) 本発明のカラー受像管用パネル洗浄方法は、蛍光面が
形成されていないパネルとシャドウマスクを組合せて高
温環境下で加熱処理を行う加熱処理工程と、加熱処理し
たパネルの内面を洗浄液を供給しながら軟質素材により
ブラッシングしてパネル内面の付着物をパネルに損傷を
与えないように除去する洗浄工程と、ブラッシングした
パネルを水洗する第1の水洗工程と、水洗したパネルを
酸洗処理する酸洗工程と、酸洗処理したパネルを水洗す
る第2の水洗工程とを有することを特徴とする。
[Structure of the Invention] (Means for Solving the Problems) In the method for cleaning a panel for a color picture tube of the present invention, a heat treatment is carried out in a high temperature environment by combining a panel having no fluorescent screen and a shadow mask. The first step of washing the inner surface of the heat-treated panel with a soft material while brushing the inner surface of the heat-treated panel with a soft material so as to remove the deposits on the inner surface of the panel without damaging the panel The present invention is characterized by including a water washing step, a pickling step of subjecting the washed panel to a pickling treatment, and a second water washing step of washing the pickled panel with water.

(作 用) 本発明は、物理的な洗浄処理を行うことでパネル内面
に付着した金属酸化物粉やその他の塵挨を完全に除去す
ることができる。
(Operation) The present invention can completely remove metal oxide powder and other dust adhering to the inner surface of the panel by performing a physical cleaning process.

(実施例) 以下、本発明方法の一実施例について第1図を参照に
しながら説明する。
(Example) Hereinafter, one example of the method of the present invention will be described with reference to FIG.

本例のカラー受像管用パネル洗浄法は大別して物理的
洗浄法と化学的洗浄法とからなり、ブラックマトリック
スまたはブラックストライプ形成工程に選ばれたパネル
をまず物理的洗浄方法として洗剤ブラッシング工程20で
ナイロンブラシやガーゼでL−92(商品名プロロニック
界面活性剤の0.2%溶液)を用いて約10〜15秒間物理的
にブラッシングし、次に水洗工程21にて約15秒の水洗を
行いしかる後酸洗工程22においてフッ酸(10〜18%)溶
液で15〜30秒間1〜1.5kg/cm2圧のスプレイ噴霧をす
る。
The panel cleaning method for color picture tubes of this example is roughly divided into a physical cleaning method and a chemical cleaning method.The panel selected in the black matrix or black stripe forming step is first subjected to nylon brushing in the detergent brushing step 20 as the physical cleaning method. Physically brush for about 10 to 15 seconds using L-92 (trade name: Prolonic Surfactant 0.2% solution) with a brush or gauze, then wash with water for about 15 seconds in washing step 21 and then acid. In the washing step 22, spraying with a hydrofluoric acid (10-18%) solution at a pressure of 1-1.5 kg / cm 2 for 15-30 seconds.

そして最終純水洗浄工程23で5kg/cm2圧の高圧水洗を
行なった後、レジスト塗布工程24でレジストの塗布を行
い、乾燥工程25を経て次工程の露光焼付工程へと送る。
このようなカラー受像管用パネル洗浄方法により実際に
パネルの処理をしたところ、パネル1枚当りの欠点数
(14インチ0.31mmピッチ)は0となった。さらにこの種
のパネルを100枚洗浄したところ80枚以上の無修正のパ
ネルを得ることができた。
Then, after high-pressure water washing with a pressure of 5 kg / cm 2 is performed in the final pure water washing step 23, a resist is applied in a resist applying step 24, and a drying step 25 is carried out, followed by sending to the next exposure / baking step.
When the panel was actually processed by such a method for cleaning a panel for a color picture tube, the number of defects (14 inch 0.31 mm pitch) per panel became 0. Furthermore, when 100 sheets of this type of panel were washed, 80 or more unmodified panels could be obtained.

[発明の効果] 以上説明したように本発明のカラー受像管用パネル洗
浄方法によれば、パネル内面に付着した塵挨を完全に除
去することができるのでパネル内面が平滑になり、無修
正のパネルを得ることができる。
As described above, according to the panel cleaning method for a color picture tube of the present invention, the dust adhering to the inner surface of the panel can be completely removed, so that the inner surface of the panel becomes smooth and the panel is uncorrected. Can be obtained.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明方法の一実施例を示す図、第2図は従来
方法を示す図、第3図は従来方法における酸洗工程での
付着物の影響を示す図である。 1……パネル 2……付着物 3……凸部 20……洗剤ブラッシング工程 21……水洗工程 22……酸洗工程 23……純水洗浄工程 24……レジスト塗布工程 25……乾燥工程
FIG. 1 is a diagram showing an embodiment of the method of the present invention, FIG. 2 is a diagram showing a conventional method, and FIG. 3 is a diagram showing the influence of deposits in the pickling step in the conventional method. 1 ... Panel 2 ... Adhesion 3 ... Convex 20 ... Detergent brushing process 21 ... Water washing process 22 ... Pickling process 23 ... Pure water washing process 24 ... Resist coating process 25 ... Drying process

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】蛍光面が形成されていないパネルとシャド
ウマスクを組合せて高温環境下で加熱処理を行う加熱処
理工程と、前記加熱処理したパネルの内面を洗浄液を供
給しながら軟質素材によりブラッシングしてパネル内面
の付着物をパネルに損傷を与えないように除去する洗浄
工程と、前記ブラッシングしたパネルを水洗する第1の
水洗工程と、前記水洗したパネルを酸洗処理する酸洗工
程と、前記酸洗処理したパネルを水洗する第2の水洗工
程とを有するカラー受像管用パネル洗浄方法。
1. A heat treatment step in which a panel without a fluorescent screen and a shadow mask are combined to perform heat treatment in a high temperature environment, and the inner surface of the heat treated panel is brushed with a soft material while supplying a cleaning liquid. A cleaning step of removing the deposits on the inner surface of the panel without damaging the panel, a first rinsing step of rinsing the brushed panel with water, a pickling step of pickling the washed panel, and A method for cleaning a panel for a color picture tube, which comprises a second washing step of washing the pickled panel with water.
JP61259165A 1986-10-30 1986-10-30 Color picture tube panel cleaning method Expired - Lifetime JPH0818851B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61259165A JPH0818851B2 (en) 1986-10-30 1986-10-30 Color picture tube panel cleaning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61259165A JPH0818851B2 (en) 1986-10-30 1986-10-30 Color picture tube panel cleaning method

Publications (2)

Publication Number Publication Date
JPS63112442A JPS63112442A (en) 1988-05-17
JPH0818851B2 true JPH0818851B2 (en) 1996-02-28

Family

ID=17330251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61259165A Expired - Lifetime JPH0818851B2 (en) 1986-10-30 1986-10-30 Color picture tube panel cleaning method

Country Status (1)

Country Link
JP (1) JPH0818851B2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58115044A (en) * 1981-12-28 1983-07-08 Watanabe Shoko:Kk Cleaning of glass

Also Published As

Publication number Publication date
JPS63112442A (en) 1988-05-17

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