JPS63112337U - - Google Patents
Info
- Publication number
- JPS63112337U JPS63112337U JP316487U JP316487U JPS63112337U JP S63112337 U JPS63112337 U JP S63112337U JP 316487 U JP316487 U JP 316487U JP 316487 U JP316487 U JP 316487U JP S63112337 U JPS63112337 U JP S63112337U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- etching rate
- insulating
- thickness
- upper layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP316487U JPS63112337U (no) | 1987-01-12 | 1987-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP316487U JPS63112337U (no) | 1987-01-12 | 1987-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112337U true JPS63112337U (no) | 1988-07-19 |
Family
ID=30782670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP316487U Pending JPS63112337U (no) | 1987-01-12 | 1987-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112337U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09251996A (ja) * | 1995-06-20 | 1997-09-22 | Semiconductor Energy Lab Co Ltd | 半導体装置の製造方法 |
-
1987
- 1987-01-12 JP JP316487U patent/JPS63112337U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09251996A (ja) * | 1995-06-20 | 1997-09-22 | Semiconductor Energy Lab Co Ltd | 半導体装置の製造方法 |