JPS63112337U - - Google Patents
Info
- Publication number
- JPS63112337U JPS63112337U JP1987003164U JP316487U JPS63112337U JP S63112337 U JPS63112337 U JP S63112337U JP 1987003164 U JP1987003164 U JP 1987003164U JP 316487 U JP316487 U JP 316487U JP S63112337 U JPS63112337 U JP S63112337U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- etching rate
- insulating
- thickness
- upper layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987003164U JPS63112337U (enExample) | 1987-01-12 | 1987-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987003164U JPS63112337U (enExample) | 1987-01-12 | 1987-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112337U true JPS63112337U (enExample) | 1988-07-19 |
Family
ID=30782670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987003164U Pending JPS63112337U (enExample) | 1987-01-12 | 1987-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112337U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09251996A (ja) * | 1995-06-20 | 1997-09-22 | Semiconductor Energy Lab Co Ltd | 半導体装置の製造方法 |
-
1987
- 1987-01-12 JP JP1987003164U patent/JPS63112337U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09251996A (ja) * | 1995-06-20 | 1997-09-22 | Semiconductor Energy Lab Co Ltd | 半導体装置の製造方法 |