JPS63111447A - 突起物検出装置 - Google Patents

突起物検出装置

Info

Publication number
JPS63111447A
JPS63111447A JP25730686A JP25730686A JPS63111447A JP S63111447 A JPS63111447 A JP S63111447A JP 25730686 A JP25730686 A JP 25730686A JP 25730686 A JP25730686 A JP 25730686A JP S63111447 A JPS63111447 A JP S63111447A
Authority
JP
Japan
Prior art keywords
protrusion
sample
side edge
scattered light
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25730686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535985B2 (enExample
Inventor
Jiyunshirou Motoyama
本山　純四郎
Masato Iwakawa
岩川　正人
Rinzo Ebukuro
江袋　林蔵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP25730686A priority Critical patent/JPS63111447A/ja
Publication of JPS63111447A publication Critical patent/JPS63111447A/ja
Publication of JPH0535985B2 publication Critical patent/JPH0535985B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP25730686A 1986-10-28 1986-10-28 突起物検出装置 Granted JPS63111447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25730686A JPS63111447A (ja) 1986-10-28 1986-10-28 突起物検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25730686A JPS63111447A (ja) 1986-10-28 1986-10-28 突起物検出装置

Publications (2)

Publication Number Publication Date
JPS63111447A true JPS63111447A (ja) 1988-05-16
JPH0535985B2 JPH0535985B2 (enExample) 1993-05-27

Family

ID=17304525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25730686A Granted JPS63111447A (ja) 1986-10-28 1986-10-28 突起物検出装置

Country Status (1)

Country Link
JP (1) JPS63111447A (enExample)

Also Published As

Publication number Publication date
JPH0535985B2 (enExample) 1993-05-27

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