JPS63110571U - - Google Patents

Info

Publication number
JPS63110571U
JPS63110571U JP173887U JP173887U JPS63110571U JP S63110571 U JPS63110571 U JP S63110571U JP 173887 U JP173887 U JP 173887U JP 173887 U JP173887 U JP 173887U JP S63110571 U JPS63110571 U JP S63110571U
Authority
JP
Japan
Prior art keywords
ion
disk
shape
mask
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP173887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP173887U priority Critical patent/JPS63110571U/ja
Publication of JPS63110571U publication Critical patent/JPS63110571U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Physical Vapour Deposition (AREA)
JP173887U 1987-01-09 1987-01-09 Pending JPS63110571U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP173887U JPS63110571U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP173887U JPS63110571U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Publications (1)

Publication Number Publication Date
JPS63110571U true JPS63110571U (enrdf_load_stackoverflow) 1988-07-15

Family

ID=30779927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP173887U Pending JPS63110571U (enrdf_load_stackoverflow) 1987-01-09 1987-01-09

Country Status (1)

Country Link
JP (1) JPS63110571U (enrdf_load_stackoverflow)

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