JPS6223857U - - Google Patents

Info

Publication number
JPS6223857U
JPS6223857U JP11445685U JP11445685U JPS6223857U JP S6223857 U JPS6223857 U JP S6223857U JP 11445685 U JP11445685 U JP 11445685U JP 11445685 U JP11445685 U JP 11445685U JP S6223857 U JPS6223857 U JP S6223857U
Authority
JP
Japan
Prior art keywords
disk
sample
samples
ion
ion processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11445685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11445685U priority Critical patent/JPS6223857U/ja
Publication of JPS6223857U publication Critical patent/JPS6223857U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP11445685U 1985-07-24 1985-07-24 Pending JPS6223857U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11445685U JPS6223857U (enrdf_load_stackoverflow) 1985-07-24 1985-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11445685U JPS6223857U (enrdf_load_stackoverflow) 1985-07-24 1985-07-24

Publications (1)

Publication Number Publication Date
JPS6223857U true JPS6223857U (enrdf_load_stackoverflow) 1987-02-13

Family

ID=30997210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11445685U Pending JPS6223857U (enrdf_load_stackoverflow) 1985-07-24 1985-07-24

Country Status (1)

Country Link
JP (1) JPS6223857U (enrdf_load_stackoverflow)

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