JPS63121438U - - Google Patents

Info

Publication number
JPS63121438U
JPS63121438U JP1413287U JP1413287U JPS63121438U JP S63121438 U JPS63121438 U JP S63121438U JP 1413287 U JP1413287 U JP 1413287U JP 1413287 U JP1413287 U JP 1413287U JP S63121438 U JPS63121438 U JP S63121438U
Authority
JP
Japan
Prior art keywords
rotating holder
ion source
sample
ion beam
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1413287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1413287U priority Critical patent/JPS63121438U/ja
Publication of JPS63121438U publication Critical patent/JPS63121438U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Drying Of Semiconductors (AREA)
JP1413287U 1987-02-02 1987-02-02 Pending JPS63121438U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1413287U JPS63121438U (enrdf_load_stackoverflow) 1987-02-02 1987-02-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1413287U JPS63121438U (enrdf_load_stackoverflow) 1987-02-02 1987-02-02

Publications (1)

Publication Number Publication Date
JPS63121438U true JPS63121438U (enrdf_load_stackoverflow) 1988-08-05

Family

ID=30803837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1413287U Pending JPS63121438U (enrdf_load_stackoverflow) 1987-02-02 1987-02-02

Country Status (1)

Country Link
JP (1) JPS63121438U (enrdf_load_stackoverflow)

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