JPS63159300U - - Google Patents

Info

Publication number
JPS63159300U
JPS63159300U JP5147387U JP5147387U JPS63159300U JP S63159300 U JPS63159300 U JP S63159300U JP 5147387 U JP5147387 U JP 5147387U JP 5147387 U JP5147387 U JP 5147387U JP S63159300 U JPS63159300 U JP S63159300U
Authority
JP
Japan
Prior art keywords
injection device
shielding means
particle injection
plates
neutral particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5147387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5147387U priority Critical patent/JPS63159300U/ja
Publication of JPS63159300U publication Critical patent/JPS63159300U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5147387U 1987-04-03 1987-04-03 Pending JPS63159300U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5147387U JPS63159300U (enrdf_load_stackoverflow) 1987-04-03 1987-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5147387U JPS63159300U (enrdf_load_stackoverflow) 1987-04-03 1987-04-03

Publications (1)

Publication Number Publication Date
JPS63159300U true JPS63159300U (enrdf_load_stackoverflow) 1988-10-18

Family

ID=30875768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5147387U Pending JPS63159300U (enrdf_load_stackoverflow) 1987-04-03 1987-04-03

Country Status (1)

Country Link
JP (1) JPS63159300U (enrdf_load_stackoverflow)

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