JPS63109438U - - Google Patents

Info

Publication number
JPS63109438U
JPS63109438U JP128887U JP128887U JPS63109438U JP S63109438 U JPS63109438 U JP S63109438U JP 128887 U JP128887 U JP 128887U JP 128887 U JP128887 U JP 128887U JP S63109438 U JPS63109438 U JP S63109438U
Authority
JP
Japan
Prior art keywords
workpiece
ion beam
current measuring
emitting means
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP128887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP128887U priority Critical patent/JPS63109438U/ja
Publication of JPS63109438U publication Critical patent/JPS63109438U/ja
Pending legal-status Critical Current

Links

JP128887U 1987-01-07 1987-01-07 Pending JPS63109438U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP128887U JPS63109438U (en:Method) 1987-01-07 1987-01-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP128887U JPS63109438U (en:Method) 1987-01-07 1987-01-07

Publications (1)

Publication Number Publication Date
JPS63109438U true JPS63109438U (en:Method) 1988-07-14

Family

ID=30779056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP128887U Pending JPS63109438U (en:Method) 1987-01-07 1987-01-07

Country Status (1)

Country Link
JP (1) JPS63109438U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03291375A (ja) * 1990-04-05 1991-12-20 Matsushita Electric Ind Co Ltd イオン源装置、および連続蒸着媒体の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03291375A (ja) * 1990-04-05 1991-12-20 Matsushita Electric Ind Co Ltd イオン源装置、および連続蒸着媒体の製造方法

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