JPS63109438U - - Google Patents
Info
- Publication number
- JPS63109438U JPS63109438U JP128887U JP128887U JPS63109438U JP S63109438 U JPS63109438 U JP S63109438U JP 128887 U JP128887 U JP 128887U JP 128887 U JP128887 U JP 128887U JP S63109438 U JPS63109438 U JP S63109438U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- ion beam
- current measuring
- emitting means
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128887U JPS63109438U (cs) | 1987-01-07 | 1987-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128887U JPS63109438U (cs) | 1987-01-07 | 1987-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63109438U true JPS63109438U (cs) | 1988-07-14 |
Family
ID=30779056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP128887U Pending JPS63109438U (cs) | 1987-01-07 | 1987-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63109438U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03291375A (ja) * | 1990-04-05 | 1991-12-20 | Matsushita Electric Ind Co Ltd | イオン源装置、および連続蒸着媒体の製造方法 |
-
1987
- 1987-01-07 JP JP128887U patent/JPS63109438U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03291375A (ja) * | 1990-04-05 | 1991-12-20 | Matsushita Electric Ind Co Ltd | イオン源装置、および連続蒸着媒体の製造方法 |
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