JPH0216556U - - Google Patents
Info
- Publication number
- JPH0216556U JPH0216556U JP9412288U JP9412288U JPH0216556U JP H0216556 U JPH0216556 U JP H0216556U JP 9412288 U JP9412288 U JP 9412288U JP 9412288 U JP9412288 U JP 9412288U JP H0216556 U JPH0216556 U JP H0216556U
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- disk
- current
- electrons
- primary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004069 differentiation Effects 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 230000010354 integration Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9412288U JPH0216556U (cs) | 1988-07-16 | 1988-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9412288U JPH0216556U (cs) | 1988-07-16 | 1988-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0216556U true JPH0216556U (cs) | 1990-02-02 |
Family
ID=31318622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9412288U Pending JPH0216556U (cs) | 1988-07-16 | 1988-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0216556U (cs) |
-
1988
- 1988-07-16 JP JP9412288U patent/JPH0216556U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0216556U (cs) | ||
| JPH0214358U (cs) | ||
| JPH03104948U (cs) | ||
| JPS63109438U (cs) | ||
| JP2702987B2 (ja) | イオンビーム加工装置 | |
| JPH02131258U (cs) | ||
| JPH0424255U (cs) | ||
| JPH0737232Y2 (ja) | イオンビーム照射装置 | |
| JPH0310461U (cs) | ||
| JP2665958B2 (ja) | イオン注入装置の制御装置 | |
| JPH0627175Y2 (ja) | Ｘ線照射装置 | |
| JPH0424254U (cs) | ||
| JPH01154489U (cs) | ||
| JPS63953A (ja) | イオン照射装置 | |
| JPH04357657A (ja) | イオン処理装置 | |
| JPH0518839Y2 (cs) | ||
| JPH025349A (ja) | ディスク電流の異常検知装置 | |
| JPH0424253U (cs) | ||
| JPH0286568U (cs) | ||
| JPH065390A (ja) | 電磁石電源の制御装置 | |
| JPS63109437U (cs) | ||
| JPS6335399Y2 (cs) | ||
| JPH0384842A (ja) | イオン処理装置 | |
| JPS6348930Y2 (cs) | ||
| JPH0455752U (cs) |