JPH0518839Y2 - - Google Patents
Info
- Publication number
- JPH0518839Y2 JPH0518839Y2 JP5799785U JP5799785U JPH0518839Y2 JP H0518839 Y2 JPH0518839 Y2 JP H0518839Y2 JP 5799785 U JP5799785 U JP 5799785U JP 5799785 U JP5799785 U JP 5799785U JP H0518839 Y2 JPH0518839 Y2 JP H0518839Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- ion
- section
- power supply
- accelerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002955 isolation Methods 0.000 claims description 14
- 230000001133 acceleration Effects 0.000 claims description 12
- 238000010884 ion-beam technique Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 description 40
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5799785U JPH0518839Y2 (cs) | 1985-04-18 | 1985-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5799785U JPH0518839Y2 (cs) | 1985-04-18 | 1985-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61174163U JPS61174163U (cs) | 1986-10-29 |
| JPH0518839Y2 true JPH0518839Y2 (cs) | 1993-05-19 |
Family
ID=30583068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5799785U Expired - Lifetime JPH0518839Y2 (cs) | 1985-04-18 | 1985-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518839Y2 (cs) |
-
1985
- 1985-04-18 JP JP5799785U patent/JPH0518839Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61174163U (cs) | 1986-10-29 |
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