JPH0133919B2 - - Google Patents

Info

Publication number
JPH0133919B2
JPH0133919B2 JP53141398A JP14139878A JPH0133919B2 JP H0133919 B2 JPH0133919 B2 JP H0133919B2 JP 53141398 A JP53141398 A JP 53141398A JP 14139878 A JP14139878 A JP 14139878A JP H0133919 B2 JPH0133919 B2 JP H0133919B2
Authority
JP
Japan
Prior art keywords
charged particle
gun chamber
electron gun
chamber
particle gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53141398A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5568096A (en
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP14139878A priority Critical patent/JPS5568096A/ja
Publication of JPS5568096A publication Critical patent/JPS5568096A/ja
Publication of JPH0133919B2 publication Critical patent/JPH0133919B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14139878A 1978-11-16 1978-11-16 Electron beam generator Granted JPS5568096A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14139878A JPS5568096A (en) 1978-11-16 1978-11-16 Electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14139878A JPS5568096A (en) 1978-11-16 1978-11-16 Electron beam generator

Publications (2)

Publication Number Publication Date
JPS5568096A JPS5568096A (en) 1980-05-22
JPH0133919B2 true JPH0133919B2 (cs) 1989-07-17

Family

ID=15291062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14139878A Granted JPS5568096A (en) 1978-11-16 1978-11-16 Electron beam generator

Country Status (1)

Country Link
JP (1) JPS5568096A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7494386B2 (ja) * 2021-04-15 2024-06-03 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4413760Y1 (cs) * 1965-10-11 1969-06-09

Also Published As

Publication number Publication date
JPS5568096A (en) 1980-05-22

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