JPS5568096A - Electron beam generator - Google Patents

Electron beam generator

Info

Publication number
JPS5568096A
JPS5568096A JP14139878A JP14139878A JPS5568096A JP S5568096 A JPS5568096 A JP S5568096A JP 14139878 A JP14139878 A JP 14139878A JP 14139878 A JP14139878 A JP 14139878A JP S5568096 A JPS5568096 A JP S5568096A
Authority
JP
Japan
Prior art keywords
electron beam
beam generator
generator
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14139878A
Other languages
Japanese (ja)
Other versions
JPH0133919B2 (en
Inventor
Riyuuzou Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP14139878A priority Critical patent/JPS5568096A/en
Publication of JPS5568096A publication Critical patent/JPS5568096A/en
Publication of JPH0133919B2 publication Critical patent/JPH0133919B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14139878A 1978-11-16 1978-11-16 Electron beam generator Granted JPS5568096A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14139878A JPS5568096A (en) 1978-11-16 1978-11-16 Electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14139878A JPS5568096A (en) 1978-11-16 1978-11-16 Electron beam generator

Publications (2)

Publication Number Publication Date
JPS5568096A true JPS5568096A (en) 1980-05-22
JPH0133919B2 JPH0133919B2 (en) 1989-07-17

Family

ID=15291062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14139878A Granted JPS5568096A (en) 1978-11-16 1978-11-16 Electron beam generator

Country Status (1)

Country Link
JP (1) JPS5568096A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022219790A1 (en) * 2021-04-15 2022-10-20 株式会社日立ハイテク Charged particle beam apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4413760Y1 (en) * 1965-10-11 1969-06-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4413760Y1 (en) * 1965-10-11 1969-06-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022219790A1 (en) * 2021-04-15 2022-10-20 株式会社日立ハイテク Charged particle beam apparatus

Also Published As

Publication number Publication date
JPH0133919B2 (en) 1989-07-17

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