JPS6310900B2 - - Google Patents
Info
- Publication number
- JPS6310900B2 JPS6310900B2 JP55044604A JP4460480A JPS6310900B2 JP S6310900 B2 JPS6310900 B2 JP S6310900B2 JP 55044604 A JP55044604 A JP 55044604A JP 4460480 A JP4460480 A JP 4460480A JP S6310900 B2 JPS6310900 B2 JP S6310900B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- type
- channel stopper
- electric field
- impurity concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4460480A JPS56142649A (en) | 1980-04-07 | 1980-04-07 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4460480A JPS56142649A (en) | 1980-04-07 | 1980-04-07 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56142649A JPS56142649A (en) | 1981-11-07 |
| JPS6310900B2 true JPS6310900B2 (enrdf_load_stackoverflow) | 1988-03-10 |
Family
ID=12696045
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4460480A Granted JPS56142649A (en) | 1980-04-07 | 1980-04-07 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56142649A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06151573A (ja) * | 1992-11-06 | 1994-05-31 | Hitachi Ltd | 半導体集積回路装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947471B2 (ja) * | 1974-12-03 | 1984-11-19 | 日本電気株式会社 | 絶縁ゲ−ト型電界効果半導体装置の製造方法 |
-
1980
- 1980-04-07 JP JP4460480A patent/JPS56142649A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56142649A (en) | 1981-11-07 |
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