JPS6310553U - - Google Patents

Info

Publication number
JPS6310553U
JPS6310553U JP10481286U JP10481286U JPS6310553U JP S6310553 U JPS6310553 U JP S6310553U JP 10481286 U JP10481286 U JP 10481286U JP 10481286 U JP10481286 U JP 10481286U JP S6310553 U JPS6310553 U JP S6310553U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
probe
contact
stylus pressure
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10481286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10481286U priority Critical patent/JPS6310553U/ja
Publication of JPS6310553U publication Critical patent/JPS6310553U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10481286U 1986-07-08 1986-07-08 Pending JPS6310553U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10481286U JPS6310553U (enExample) 1986-07-08 1986-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10481286U JPS6310553U (enExample) 1986-07-08 1986-07-08

Publications (1)

Publication Number Publication Date
JPS6310553U true JPS6310553U (enExample) 1988-01-23

Family

ID=30978650

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10481286U Pending JPS6310553U (enExample) 1986-07-08 1986-07-08

Country Status (1)

Country Link
JP (1) JPS6310553U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116637A (en) * 1980-02-20 1981-09-12 Nec Corp Detector for semiconductor device
JPS5917259A (ja) * 1982-07-20 1984-01-28 Nec Corp 半導体素子の測定方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116637A (en) * 1980-02-20 1981-09-12 Nec Corp Detector for semiconductor device
JPS5917259A (ja) * 1982-07-20 1984-01-28 Nec Corp 半導体素子の測定方法

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