JPS63100838U - - Google Patents
Info
- Publication number
- JPS63100838U JPS63100838U JP19588486U JP19588486U JPS63100838U JP S63100838 U JPS63100838 U JP S63100838U JP 19588486 U JP19588486 U JP 19588486U JP 19588486 U JP19588486 U JP 19588486U JP S63100838 U JPS63100838 U JP S63100838U
- Authority
- JP
- Japan
- Prior art keywords
- inspection device
- foreign matter
- calibration sample
- matter inspection
- wafer surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims description 5
- 238000000149 argon plasma sintering Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19588486U JPS63100838U (cs) | 1986-12-22 | 1986-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19588486U JPS63100838U (cs) | 1986-12-22 | 1986-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63100838U true JPS63100838U (cs) | 1988-06-30 |
Family
ID=31154183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19588486U Pending JPS63100838U (cs) | 1986-12-22 | 1986-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63100838U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023548233A (ja) * | 2020-11-09 | 2023-11-15 | ジルトロニック アクチエンゲゼルシャフト | 半導体ウェハの表面上の未知の粒子を分類する方法 |
-
1986
- 1986-12-22 JP JP19588486U patent/JPS63100838U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023548233A (ja) * | 2020-11-09 | 2023-11-15 | ジルトロニック アクチエンゲゼルシャフト | 半導体ウェハの表面上の未知の粒子を分類する方法 |
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