JPS6310057U - - Google Patents
Info
- Publication number
- JPS6310057U JPS6310057U JP1986103927U JP10392786U JPS6310057U JP S6310057 U JPS6310057 U JP S6310057U JP 1986103927 U JP1986103927 U JP 1986103927U JP 10392786 U JP10392786 U JP 10392786U JP S6310057 U JPS6310057 U JP S6310057U
- Authority
- JP
- Japan
- Prior art keywords
- polishing jig
- semiconductor wafers
- template
- mat
- workpieces
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986103927U JPH0453896Y2 (cs) | 1986-07-07 | 1986-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986103927U JPH0453896Y2 (cs) | 1986-07-07 | 1986-07-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6310057U true JPS6310057U (cs) | 1988-01-22 |
| JPH0453896Y2 JPH0453896Y2 (cs) | 1992-12-17 |
Family
ID=30976940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986103927U Expired JPH0453896Y2 (cs) | 1986-07-07 | 1986-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0453896Y2 (cs) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0413568A (ja) * | 1990-04-27 | 1992-01-17 | Shin Etsu Handotai Co Ltd | バッキングパッド、その精密平面加工方法およびそれを用いた半導体ウェーハの研磨方法 |
| JPH0650751U (ja) * | 1992-12-10 | 1994-07-12 | ロデール・ニッタ株式会社 | 被研磨物保持具 |
| JP2003179015A (ja) * | 1998-06-03 | 2003-06-27 | Applied Materials Inc | 化学的機械的研磨用の多層の止め輪を有するキャリア・ヘッド |
| JP2006255827A (ja) * | 2005-03-17 | 2006-09-28 | Fujibo Holdings Inc | 保持具 |
| JP2007069295A (ja) * | 2005-09-06 | 2007-03-22 | Nitta Haas Inc | 被研磨物保持具 |
| JP2008030175A (ja) * | 2006-07-31 | 2008-02-14 | Setsuko Kondo | ロアチャックパッド |
| WO2019058871A1 (ja) * | 2017-09-22 | 2019-03-28 | 信越半導体株式会社 | 研磨ヘッド及び研磨ヘッドの製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59219153A (ja) * | 1983-05-27 | 1984-12-10 | Citizen Watch Co Ltd | 磁気ヘツドの精密研磨加工法 |
| JPS60249568A (ja) * | 1984-05-21 | 1985-12-10 | Sumitomo Electric Ind Ltd | 半導体ウエハの研磨方法 |
-
1986
- 1986-07-07 JP JP1986103927U patent/JPH0453896Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59219153A (ja) * | 1983-05-27 | 1984-12-10 | Citizen Watch Co Ltd | 磁気ヘツドの精密研磨加工法 |
| JPS60249568A (ja) * | 1984-05-21 | 1985-12-10 | Sumitomo Electric Ind Ltd | 半導体ウエハの研磨方法 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0413568A (ja) * | 1990-04-27 | 1992-01-17 | Shin Etsu Handotai Co Ltd | バッキングパッド、その精密平面加工方法およびそれを用いた半導体ウェーハの研磨方法 |
| JPH0650751U (ja) * | 1992-12-10 | 1994-07-12 | ロデール・ニッタ株式会社 | 被研磨物保持具 |
| JP2003179015A (ja) * | 1998-06-03 | 2003-06-27 | Applied Materials Inc | 化学的機械的研磨用の多層の止め輪を有するキャリア・ヘッド |
| JP2006255827A (ja) * | 2005-03-17 | 2006-09-28 | Fujibo Holdings Inc | 保持具 |
| JP2007069295A (ja) * | 2005-09-06 | 2007-03-22 | Nitta Haas Inc | 被研磨物保持具 |
| JP2008030175A (ja) * | 2006-07-31 | 2008-02-14 | Setsuko Kondo | ロアチャックパッド |
| WO2019058871A1 (ja) * | 2017-09-22 | 2019-03-28 | 信越半導体株式会社 | 研磨ヘッド及び研磨ヘッドの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0453896Y2 (cs) | 1992-12-17 |