JPS6298227U - - Google Patents
Info
- Publication number
- JPS6298227U JPS6298227U JP19162685U JP19162685U JPS6298227U JP S6298227 U JPS6298227 U JP S6298227U JP 19162685 U JP19162685 U JP 19162685U JP 19162685 U JP19162685 U JP 19162685U JP S6298227 U JPS6298227 U JP S6298227U
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- main surface
- porous
- plate carrier
- wax
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011147 inorganic material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19162685U JPS6298227U (fr) | 1985-12-12 | 1985-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19162685U JPS6298227U (fr) | 1985-12-12 | 1985-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6298227U true JPS6298227U (fr) | 1987-06-23 |
Family
ID=31145939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19162685U Pending JPS6298227U (fr) | 1985-12-12 | 1985-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6298227U (fr) |
-
1985
- 1985-12-12 JP JP19162685U patent/JPS6298227U/ja active Pending
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