JPS6298227U - - Google Patents
Info
- Publication number
- JPS6298227U JPS6298227U JP19162685U JP19162685U JPS6298227U JP S6298227 U JPS6298227 U JP S6298227U JP 19162685 U JP19162685 U JP 19162685U JP 19162685 U JP19162685 U JP 19162685U JP S6298227 U JPS6298227 U JP S6298227U
- Authority
- JP
- Japan
- Prior art keywords
- thin plate
- main surface
- porous
- plate carrier
- wax
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011147 inorganic material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
図はこの考案の一実施例を示す拡大部分断面図
である。
図において、１は薄板（ウエーハ）、２はキヤ
リヤ、３は孔、４はワツクスである。
The figure is an enlarged partial sectional view showing one embodiment of this invention. In the figure, 1 is a thin plate (wafer), 2 is a carrier, 3 is a hole, and 4 is wax.
Claims (1)
ワツクスで貼りつけ保持するものにおいて、 上記一方の主面から反対側の他方の面へ通ずる
孔を高密度に多数有する多孔性板からなることを
特徴とする薄板キヤリヤ。 (2) 多孔性板はガラス、セラミツク等の無機材
料からなることを特徴とする実用新案登録請求の
範囲第１項記載の薄板キヤリヤ。[Claims for Utility Model Registration] (1) In a device in which a thin plate such as a semiconductor wafer is attached and held on one main surface with wax, holes communicating from the one main surface to the other surface on the opposite side are formed in a high density. A thin plate carrier comprising a plurality of porous plates. (2) The thin plate carrier according to claim 1, wherein the porous plate is made of an inorganic material such as glass or ceramic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19162685U JPS6298227U (en) | 1985-12-12 | 1985-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19162685U JPS6298227U (en) | 1985-12-12 | 1985-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6298227U true JPS6298227U (en) | 1987-06-23 |
Family
ID=31145939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19162685U Pending JPS6298227U (en) | 1985-12-12 | 1985-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6298227U (en) |
-
1985
- 1985-12-12 JP JP19162685U patent/JPS6298227U/ja active Pending
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