JPS60118239U - Board support - Google Patents
Board supportInfo
- Publication number
- JPS60118239U JPS60118239U JP593484U JP593484U JPS60118239U JP S60118239 U JPS60118239 U JP S60118239U JP 593484 U JP593484 U JP 593484U JP 593484 U JP593484 U JP 593484U JP S60118239 U JPS60118239 U JP S60118239U
- Authority
- JP
- Japan
- Prior art keywords
- board support
- depression
- abstract
- substrate support
- recorded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａ、 ｂは、基板支持具の従来例の平面図、断面
図、第２図ａ、 ｂは本考案実施例の平面図、第３図は
本考案実施例基板支持具の状態断面図である。
２・・・・・・板状くぼみ部、６・・・・・・基板支持
具、７・・・・・・酸化膜、８・・・・・・半導体ウェ
ーハ。Figures 1a and b are a plan view and a sectional view of a conventional example of a substrate support, Figures 2a and b are a plan view of an embodiment of the present invention, and Figure 3 is a cross-sectional view of a substrate support according to an embodiment of the present invention. It is a diagram. 2... Plate-shaped depression, 6... Substrate support, 7... Oxide film, 8... Semiconductor wafer.
Claims (1)
の表面に熱膨張率の小さい物質の被層を設けた基板支持
具。A substrate support having a depression on one surface of the base and a coating layer of a material with a low coefficient of thermal expansion on the surface of the depression.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP593484U JPS60118239U (en) | 1984-01-19 | 1984-01-19 | Board support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP593484U JPS60118239U (en) | 1984-01-19 | 1984-01-19 | Board support |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60118239U true JPS60118239U (en) | 1985-08-09 |
| JPH034035Y2 JPH034035Y2 (en) | 1991-02-01 |
Family
ID=30482906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP593484U Granted JPS60118239U (en) | 1984-01-19 | 1984-01-19 | Board support |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60118239U (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5619166B2 (en) * | 2010-08-20 | 2014-11-05 | 株式会社Ｂａｃｋｓ Ｖｅｒｓｅ | Saxophone |
-
1984
- 1984-01-19 JP JP593484U patent/JPS60118239U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034035Y2 (en) | 1991-02-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60118239U (en) | Board support | |
| JPS58124444U (en) | conductive adhesive tape | |
| JPS6063943U (en) | Mount frame for semiconductor wafers | |
| JPS59189846U (en) | conductive adhesive tape | |
| JPS6024566U (en) | ceramic printing plate | |
| JPS6072827U (en) | Architectural base material | |
| JPS60190049U (en) | semiconductor equipment | |
| JPS6384941U (en) | ||
| JPS5994830U (en) | board material | |
| JPS59131103U (en) | thin film resistor | |
| JPS59433U (en) | tile | |
| JPS58120655U (en) | Adhesive sheet for wafer dicing | |
| JPS5895432U (en) | Insulating exterior base material | |
| JPS58119787U (en) | watch dial | |
| JPS5881949U (en) | integrated circuit board | |
| JPS6115772U (en) | ceramic wiring board | |
| JPS5916165U (en) | magnetoresistive element | |
| JPS59159942U (en) | spinner device | |
| JPS60191044U (en) | diazo copying material | |
| JPS60129143U (en) | electronic components | |
| JPS59145545U (en) | Adhesive sheet | |
| JPS6140718U (en) | Transfer magnetic sheet | |
| JPS5935984U (en) | Thin film EL display | |
| JPS6112260U (en) | Semiconductor laser array device | |
| JPS616889U (en) | article retention panel |