JPS6296219A - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS6296219A
JPS6296219A JP23533385A JP23533385A JPS6296219A JP S6296219 A JPS6296219 A JP S6296219A JP 23533385 A JP23533385 A JP 23533385A JP 23533385 A JP23533385 A JP 23533385A JP S6296219 A JPS6296219 A JP S6296219A
Authority
JP
Japan
Prior art keywords
pair
belt
pulleys
air cylinders
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23533385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0154244B2 (enrdf_load_stackoverflow
Inventor
Yoshihide Suwa
好英 諏訪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP23533385A priority Critical patent/JPS6296219A/ja
Publication of JPS6296219A publication Critical patent/JPS6296219A/ja
Publication of JPH0154244B2 publication Critical patent/JPH0154244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Framework For Endless Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
JP23533385A 1985-10-23 1985-10-23 搬送装置 Granted JPS6296219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23533385A JPS6296219A (ja) 1985-10-23 1985-10-23 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23533385A JPS6296219A (ja) 1985-10-23 1985-10-23 搬送装置

Publications (2)

Publication Number Publication Date
JPS6296219A true JPS6296219A (ja) 1987-05-02
JPH0154244B2 JPH0154244B2 (enrdf_load_stackoverflow) 1989-11-17

Family

ID=16984549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23533385A Granted JPS6296219A (ja) 1985-10-23 1985-10-23 搬送装置

Country Status (1)

Country Link
JP (1) JPS6296219A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012201506A (ja) * 2011-03-28 2012-10-22 Hirata Corp 生産装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4496447B2 (ja) * 2000-07-06 2010-07-07 株式会社Ihi 基板移載装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012201506A (ja) * 2011-03-28 2012-10-22 Hirata Corp 生産装置

Also Published As

Publication number Publication date
JPH0154244B2 (enrdf_load_stackoverflow) 1989-11-17

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