JPS6293467U - - Google Patents
Info
- Publication number
- JPS6293467U JPS6293467U JP18694485U JP18694485U JPS6293467U JP S6293467 U JPS6293467 U JP S6293467U JP 18694485 U JP18694485 U JP 18694485U JP 18694485 U JP18694485 U JP 18694485U JP S6293467 U JPS6293467 U JP S6293467U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum valve
- casing
- powder
- valve
- passageway
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000843 powder Substances 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims 1
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18694485U JPS6293467U (zh) | 1985-12-03 | 1985-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18694485U JPS6293467U (zh) | 1985-12-03 | 1985-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6293467U true JPS6293467U (zh) | 1987-06-15 |
Family
ID=31136962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18694485U Pending JPS6293467U (zh) | 1985-12-03 | 1985-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6293467U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007066537A1 (ja) * | 2005-12-05 | 2007-06-14 | Ulvac, Inc. | 真空装置用仕切りバルブ |
| JP2020139527A (ja) * | 2019-02-27 | 2020-09-03 | 株式会社フジ・テクノロジー | 流体開閉装置及び流体の開閉方法 |
-
1985
- 1985-12-03 JP JP18694485U patent/JPS6293467U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007066537A1 (ja) * | 2005-12-05 | 2007-06-14 | Ulvac, Inc. | 真空装置用仕切りバルブ |
| CN101321888A (zh) * | 2005-12-05 | 2008-12-10 | 株式会社爱发科 | 真空装置用闸阀 |
| JPWO2007066537A1 (ja) * | 2005-12-05 | 2009-05-14 | 株式会社アルバック | 真空装置用仕切りバルブ |
| JP2020139527A (ja) * | 2019-02-27 | 2020-09-03 | 株式会社フジ・テクノロジー | 流体開閉装置及び流体の開閉方法 |