JPS6293467U - - Google Patents

Info

Publication number
JPS6293467U
JPS6293467U JP18694485U JP18694485U JPS6293467U JP S6293467 U JPS6293467 U JP S6293467U JP 18694485 U JP18694485 U JP 18694485U JP 18694485 U JP18694485 U JP 18694485U JP S6293467 U JPS6293467 U JP S6293467U
Authority
JP
Japan
Prior art keywords
vacuum valve
casing
powder
valve
passageway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18694485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18694485U priority Critical patent/JPS6293467U/ja
Publication of JPS6293467U publication Critical patent/JPS6293467U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
JP18694485U 1985-12-03 1985-12-03 Pending JPS6293467U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18694485U JPS6293467U (enExample) 1985-12-03 1985-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18694485U JPS6293467U (enExample) 1985-12-03 1985-12-03

Publications (1)

Publication Number Publication Date
JPS6293467U true JPS6293467U (enExample) 1987-06-15

Family

ID=31136962

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18694485U Pending JPS6293467U (enExample) 1985-12-03 1985-12-03

Country Status (1)

Country Link
JP (1) JPS6293467U (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007066537A1 (ja) * 2005-12-05 2007-06-14 Ulvac, Inc. 真空装置用仕切りバルブ
JP2020139527A (ja) * 2019-02-27 2020-09-03 株式会社フジ・テクノロジー 流体開閉装置及び流体の開閉方法
CN114555990A (zh) * 2019-10-18 2022-05-27 Vat控股公司 带阀的装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007066537A1 (ja) * 2005-12-05 2007-06-14 Ulvac, Inc. 真空装置用仕切りバルブ
CN101321888A (zh) * 2005-12-05 2008-12-10 株式会社爱发科 真空装置用闸阀
JPWO2007066537A1 (ja) * 2005-12-05 2009-05-14 株式会社アルバック 真空装置用仕切りバルブ
JP2020139527A (ja) * 2019-02-27 2020-09-03 株式会社フジ・テクノロジー 流体開閉装置及び流体の開閉方法
CN114555990A (zh) * 2019-10-18 2022-05-27 Vat控股公司 带阀的装置

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